Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co LtdfiledCriticalNippon Electric Co Ltd
Priority to JP10995679ApriorityCriticalpatent/JPS5633853A/ja
Publication of JPS5633853ApublicationCriticalpatent/JPS5633853A/ja
Publication of JPS6350857B2publicationCriticalpatent/JPS6350857B2/ja
H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
H10D84/01—Manufacture or treatment
Landscapes
Internal Circuitry In Semiconductor Integrated Circuit Devices
(AREA)
Design And Manufacture Of Integrated Circuits
(AREA)