JPS6349218B2 - - Google Patents
Info
- Publication number
- JPS6349218B2 JPS6349218B2 JP61199852A JP19985286A JPS6349218B2 JP S6349218 B2 JPS6349218 B2 JP S6349218B2 JP 61199852 A JP61199852 A JP 61199852A JP 19985286 A JP19985286 A JP 19985286A JP S6349218 B2 JPS6349218 B2 JP S6349218B2
- Authority
- JP
- Japan
- Prior art keywords
- projection
- reticle
- printed circuit
- wiring pattern
- circuit board
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP61199852A JPS6355550A (ja) | 1986-08-26 | 1986-08-26 | プリント基板の分割投影露光方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP61199852A JPS6355550A (ja) | 1986-08-26 | 1986-08-26 | プリント基板の分割投影露光方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6355550A JPS6355550A (ja) | 1988-03-10 |
JPS6349218B2 true JPS6349218B2 (enrdf_load_stackoverflow) | 1988-10-04 |
Family
ID=16414722
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP61199852A Granted JPS6355550A (ja) | 1986-08-26 | 1986-08-26 | プリント基板の分割投影露光方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6355550A (enrdf_load_stackoverflow) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5107324A (en) * | 1989-04-27 | 1992-04-21 | Fuji Electric Co., Ltd. | Two-terminal semiconductor device of surface installation type |
AU3676500A (en) | 1999-05-07 | 2000-11-21 | Nikon Corporation | Aligner, microdevice, photomask, exposure method, and method of manufacturing device |
TWI658334B (zh) * | 2017-08-29 | 2019-05-01 | 同泰電子科技股份有限公司 | 軟性電路板及其製作方法 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57112753A (en) * | 1980-12-29 | 1982-07-13 | Fujitsu Ltd | Exposure method |
JPS57183032A (en) * | 1981-05-06 | 1982-11-11 | Toshiba Corp | Method for wafer exposure and device thereof |
JPS6318352A (ja) * | 1986-07-11 | 1988-01-26 | Agency Of Ind Science & Technol | 分割露光用マスク |
-
1986
- 1986-08-26 JP JP61199852A patent/JPS6355550A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS6355550A (ja) | 1988-03-10 |
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