JPS6348186B2 - - Google Patents
Info
- Publication number
- JPS6348186B2 JPS6348186B2 JP58169788A JP16978883A JPS6348186B2 JP S6348186 B2 JPS6348186 B2 JP S6348186B2 JP 58169788 A JP58169788 A JP 58169788A JP 16978883 A JP16978883 A JP 16978883A JP S6348186 B2 JPS6348186 B2 JP S6348186B2
- Authority
- JP
- Japan
- Prior art keywords
- upper electrode
- unit capacitance
- capacitance element
- semiconductor integrated
- group
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004065 semiconductor Substances 0.000 claims description 8
- 239000000463 material Substances 0.000 claims description 3
- 238000005530 etching Methods 0.000 description 6
- 230000000694 effects Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000004965 Hartree-Fock calculation Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 230000003071 parasitic effect Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
- H01L27/10—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a repetitive configuration
- H01L27/101—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a repetitive configuration including resistors or capacitors only
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Semiconductor Integrated Circuits (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP58169788A JPS6060751A (ja) | 1983-09-14 | 1983-09-14 | 半導体集積回路 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP58169788A JPS6060751A (ja) | 1983-09-14 | 1983-09-14 | 半導体集積回路 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6060751A JPS6060751A (ja) | 1985-04-08 |
JPS6348186B2 true JPS6348186B2 (ru) | 1988-09-28 |
Family
ID=15892883
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP58169788A Granted JPS6060751A (ja) | 1983-09-14 | 1983-09-14 | 半導体集積回路 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6060751A (ru) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6461043A (en) * | 1987-09-01 | 1989-03-08 | Nec Corp | Semiconductor device |
JPH0864764A (ja) * | 1994-08-25 | 1996-03-08 | Nippon Motorola Ltd | ユニットキャパシタ |
JP2004179419A (ja) | 2002-11-27 | 2004-06-24 | Toshiba Corp | 半導体装置及びその製造方法 |
JP5774708B2 (ja) * | 2011-08-24 | 2015-09-09 | ルネサスエレクトロニクス株式会社 | 半導体装置 |
-
1983
- 1983-09-14 JP JP58169788A patent/JPS6060751A/ja active Granted
Non-Patent Citations (1)
Title |
---|
IEEE JOURNAL OF SOLID-STATE CIRCUITS=1975 * |
Also Published As
Publication number | Publication date |
---|---|
JPS6060751A (ja) | 1985-04-08 |
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