JPS6461043A - Semiconductor device - Google Patents
Semiconductor deviceInfo
- Publication number
- JPS6461043A JPS6461043A JP21940187A JP21940187A JPS6461043A JP S6461043 A JPS6461043 A JP S6461043A JP 21940187 A JP21940187 A JP 21940187A JP 21940187 A JP21940187 A JP 21940187A JP S6461043 A JPS6461043 A JP S6461043A
- Authority
- JP
- Japan
- Prior art keywords
- capacity
- electrode
- error
- decrease
- insulating film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Semiconductor Integrated Circuits (AREA)
Abstract
PURPOSE:To reduce correlation capacity and to decrease the error of a capacity ratio by providing an interference preventing shielding conductor layer on the periphery of a second capacity electrode of a capacity element. CONSTITUTION:A capacity electrode 2 of a lower layer is provided on an insulating film 1. A capacity electrode 4 of an upper layer and a shielding conductor layer 5 for preventing an interference to surround the electrode 4 are provided through a dielectric film 3 on the electrode 2. Further, the entirety is covered with an insulating film 6, a contact window is opened, and wirings 7 are provided thereon. Thus, its correlation capacity is reduced to decrease the error of its capacity ratio.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP21940187A JPS6461043A (en) | 1987-09-01 | 1987-09-01 | Semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP21940187A JPS6461043A (en) | 1987-09-01 | 1987-09-01 | Semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6461043A true JPS6461043A (en) | 1989-03-08 |
Family
ID=16734833
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP21940187A Pending JPS6461043A (en) | 1987-09-01 | 1987-09-01 | Semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6461043A (en) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6060751A (en) * | 1983-09-14 | 1985-04-08 | Nec Corp | Semiconductor integrated circuit |
-
1987
- 1987-09-01 JP JP21940187A patent/JPS6461043A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6060751A (en) * | 1983-09-14 | 1985-04-08 | Nec Corp | Semiconductor integrated circuit |
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