JPS6343423U - - Google Patents
Info
- Publication number
- JPS6343423U JPS6343423U JP13634586U JP13634586U JPS6343423U JP S6343423 U JPS6343423 U JP S6343423U JP 13634586 U JP13634586 U JP 13634586U JP 13634586 U JP13634586 U JP 13634586U JP S6343423 U JPS6343423 U JP S6343423U
- Authority
- JP
- Japan
- Prior art keywords
- quartz glass
- silicon carbide
- thickness
- heat treatment
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 5
- 238000010438 heat treatment Methods 0.000 claims description 2
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims description 2
- 229910010271 silicon carbide Inorganic materials 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- 239000012535 impurity Substances 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
Landscapes
- Surface Treatment Of Glass (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Description
第１図は本考案の石英部材の不純物透過性試験
装置の説明図、第２図は石英ガラスリングの加熱
による変形の説明図である。 １……合成石英片、２……炭化珪素被覆石英ガ
ラス管、３……Ｎａソース、４……炉芯管、５…
…ガス供給口、６……ヒーター。
装置の説明図、第２図は石英ガラスリングの加熱
による変形の説明図である。 １……合成石英片、２……炭化珪素被覆石英ガ
ラス管、３……Ｎａソース、４……炉芯管、５…
…ガス供給口、６……ヒーター。
Claims (1)
- 表面に厚さ０．５〜３０μｍの炭化珪素被膜を
形成してなることを特徴とする半導体ウエーハの
熱処理用石英ガラス製部材。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13634586U JPS6343423U (ja) | 1986-09-05 | 1986-09-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13634586U JPS6343423U (ja) | 1986-09-05 | 1986-09-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6343423U true JPS6343423U (ja) | 1988-03-23 |
Family
ID=31039366
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13634586U Pending JPS6343423U (ja) | 1986-09-05 | 1986-09-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6343423U (ja) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5285476A (en) * | 1976-01-09 | 1977-07-15 | Hitachi Ltd | Semiconductor wafer accommodating jig |
-
1986
- 1986-09-05 JP JP13634586U patent/JPS6343423U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5285476A (en) * | 1976-01-09 | 1977-07-15 | Hitachi Ltd | Semiconductor wafer accommodating jig |