JPH0276835U - - Google Patents
Info
- Publication number
- JPH0276835U JPH0276835U JP15667888U JP15667888U JPH0276835U JP H0276835 U JPH0276835 U JP H0276835U JP 15667888 U JP15667888 U JP 15667888U JP 15667888 U JP15667888 U JP 15667888U JP H0276835 U JPH0276835 U JP H0276835U
- Authority
- JP
- Japan
- Prior art keywords
- susceptor
- transparent quartz
- quartz tube
- semiconductor wafer
- radiation thermometer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010438 heat treatment Methods 0.000 claims description 6
- 239000010453 quartz Substances 0.000 claims description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 5
- 230000005855 radiation Effects 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 claims description 3
- 239000000463 material Substances 0.000 claims description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims 1
- 229910052799 carbon Inorganic materials 0.000 claims 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims 1
- 229910010271 silicon carbide Inorganic materials 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
- 230000003287 optical effect Effects 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
Landscapes
- Radiation Pyrometers (AREA)
Description
第１図は、本考案による光加熱処理装置を示す
図、第２図および第３図は従来の光加熱処理装置
の例を示す図、第４図は放射温度計の検出素子、
光加熱ランプ光源および各材料の透過波長の波長
範囲を示す図である。 １……半導体ウエハ、２……サセプタ、３……
保持治具、４……透明石英管、５……放射温度計
、６……光加熱ランプ。
図、第２図および第３図は従来の光加熱処理装置
の例を示す図、第４図は放射温度計の検出素子、
光加熱ランプ光源および各材料の透過波長の波長
範囲を示す図である。 １……半導体ウエハ、２……サセプタ、３……
保持治具、４……透明石英管、５……放射温度計
、６……光加熱ランプ。
Claims (1)
- 【実用新案登録請求の範囲】 透明石英管の内部に位置し、炭素および炭化ケ
イ素のうちの少なくとも一つの材料からなり、１
mm以上５mm以下の厚さをもつサセプタと、透明石
英からなる該サセプタ保持治具と、 前記透明石英管の外部に位置し、前記サセプタ
の下方に配置した光加熱ランプと、前記サセプタ
上に載置した半導体ウエハをのぞむ位置に配置し
た放射温度計とから成り、 該放射温度計により、前記透明石英管の壁を介
して、前記半導体ウエハの温度を測定・制御する
ことを特徴とする光加熱処理装置。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988156678U JPH0739228Y2 (ja) | 1988-12-02 | 1988-12-02 | 光加熱処理装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988156678U JPH0739228Y2 (ja) | 1988-12-02 | 1988-12-02 | 光加熱処理装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0276835U true JPH0276835U (ja) | 1990-06-13 |
| JPH0739228Y2 JPH0739228Y2 (ja) | 1995-09-06 |
Family
ID=31435431
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988156678U Expired - Lifetime JPH0739228Y2 (ja) | 1988-12-02 | 1988-12-02 | 光加熱処理装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0739228Y2 (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014220331A (ja) * | 2013-05-07 | 2014-11-20 | 株式会社リコー | 電磁波照射装置 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60211947A (ja) * | 1984-04-06 | 1985-10-24 | Hitachi Ltd | 瞬間アニ−ル装置 |
-
1988
- 1988-12-02 JP JP1988156678U patent/JPH0739228Y2/ja not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60211947A (ja) * | 1984-04-06 | 1985-10-24 | Hitachi Ltd | 瞬間アニ−ル装置 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014220331A (ja) * | 2013-05-07 | 2014-11-20 | 株式会社リコー | 電磁波照射装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0739228Y2 (ja) | 1995-09-06 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |