JPH0256435U - - Google Patents

Info

Publication number
JPH0256435U
JPH0256435U JP13582588U JP13582588U JPH0256435U JP H0256435 U JPH0256435 U JP H0256435U JP 13582588 U JP13582588 U JP 13582588U JP 13582588 U JP13582588 U JP 13582588U JP H0256435 U JPH0256435 U JP H0256435U
Authority
JP
Japan
Prior art keywords
boat
holds
incorporated
utility
type semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13582588U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13582588U priority Critical patent/JPH0256435U/ja
Publication of JPH0256435U publication Critical patent/JPH0256435U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Measuring Temperature Or Quantity Of Heat (AREA)

Description

【図面の簡単な説明】
第１図ａ〜ｃは本考案の実施例の概略図、ａ，
ｂ，ｃはボートが反応炉へ出し入れされる経過を
示している。第２図、第３図は従来の実施例の概
略図。 １……ヒータ、２……反応炉、３……熱電対（
反応炉外）、４……ウエハ、５……ウエハボート
、６……ボート保持部（反応炉フタ）、７……熱
電対（反応炉内）。

Claims (1)

    【実用新案登録請求の範囲】
  1. 横型拡散炉型半導体製造装置において、ボート
    を保持する部分に、温度測定用熱電対が組み込ま
    れていることを特徴とする半導体製造装置。
JP13582588U 1988-10-18 1988-10-18 Pending JPH0256435U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13582588U JPH0256435U (ja) 1988-10-18 1988-10-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13582588U JPH0256435U (ja) 1988-10-18 1988-10-18

Publications (1)

Publication Number Publication Date
JPH0256435U true JPH0256435U (ja) 1990-04-24

Family

ID=31395771

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13582588U Pending JPH0256435U (ja) 1988-10-18 1988-10-18

Country Status (1)

Country Link
JP (1) JPH0256435U (ja)

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