JPS63127121U - - Google Patents
Info
- Publication number
- JPS63127121U JPS63127121U JP1804587U JP1804587U JPS63127121U JP S63127121 U JPS63127121 U JP S63127121U JP 1804587 U JP1804587 U JP 1804587U JP 1804587 U JP1804587 U JP 1804587U JP S63127121 U JPS63127121 U JP S63127121U
- Authority
- JP
- Japan
- Prior art keywords
- wheels
- wafer
- heat treatment
- wafer board
- cover
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims 4
- 238000010438 heat treatment Methods 0.000 claims 2
- 239000004065 semiconductor Substances 0.000 claims 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Description
第１図は本考案の一実施例の部分断面図である
。 １：シリコンウエハ、２：ウエハ立て、３：ウ
エハボード、４：車輪、５：炉心管、６：カバー
。
。 １：シリコンウエハ、２：ウエハ立て、３：ウ
エハボード、４：車輪、５：炉心管、６：カバー
。
Claims (1)
- 半導体ウエハを支持するウエハ立てを、車輪を
有するウエハボードに載せて熱処理炉の炉心管に
入れ出しするものにおいて、ウエハボードの車輪
部がカバーで覆われたことを特徴とする熱処理装
置。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1804587U JPS63127121U (ja) | 1987-02-10 | 1987-02-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1804587U JPS63127121U (ja) | 1987-02-10 | 1987-02-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63127121U true JPS63127121U (ja) | 1988-08-19 |
Family
ID=30811363
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1804587U Pending JPS63127121U (ja) | 1987-02-10 | 1987-02-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63127121U (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012015327A (ja) * | 2010-06-30 | 2012-01-19 | Sumco Corp | ウェーハチャージ補助台 |
-
1987
- 1987-02-10 JP JP1804587U patent/JPS63127121U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012015327A (ja) * | 2010-06-30 | 2012-01-19 | Sumco Corp | ウェーハチャージ補助台 |