JPS6331535U - - Google Patents
Info
- Publication number
- JPS6331535U JPS6331535U JP12470486U JP12470486U JPS6331535U JP S6331535 U JPS6331535 U JP S6331535U JP 12470486 U JP12470486 U JP 12470486U JP 12470486 U JP12470486 U JP 12470486U JP S6331535 U JPS6331535 U JP S6331535U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- rotary table
- processing surface
- semiconductor
- manufacturing apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 6
- 238000004519 manufacturing process Methods 0.000 claims description 3
Landscapes
- ing And Chemical Polishing (AREA)
- Drying Of Semiconductors (AREA)
Description
第１図は本考案に係る半導体製造装置の一実施
例を示す概略正面図、第２図は第１図のＡ部拡大
図、第３図は他の実施例を示す概略正面図、第４
図は従来の半導体装置の一例を示す概略正面図で
ある。 １１……回転テーブル、１２……ウエーハ（半
導体ウエーハ）、１７，２０……反転機構、１８
，１９……半導体製造装置。
例を示す概略正面図、第２図は第１図のＡ部拡大
図、第３図は他の実施例を示す概略正面図、第４
図は従来の半導体装置の一例を示す概略正面図で
ある。 １１……回転テーブル、１２……ウエーハ（半
導体ウエーハ）、１７，２０……反転機構、１８
，１９……半導体製造装置。
Claims (1)
- 処理面を上方に向けて半導体ウエーハが載置さ
れた回転テーブルと、上記回転テーブルを１８０
°回転させて上記ウエーハの処理面を下方に向け
る反転機構とを具備したことを特徴とする半導体
製造装置。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12470486U JPS6331535U (ja) | 1986-08-14 | 1986-08-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12470486U JPS6331535U (ja) | 1986-08-14 | 1986-08-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6331535U true JPS6331535U (ja) | 1988-03-01 |
Family
ID=31016965
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12470486U Pending JPS6331535U (ja) | 1986-08-14 | 1986-08-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6331535U (ja) |
-
1986
- 1986-08-14 JP JP12470486U patent/JPS6331535U/ja active Pending