JPH0256431U - - Google Patents
Info
- Publication number
- JPH0256431U JPH0256431U JP13585188U JP13585188U JPH0256431U JP H0256431 U JPH0256431 U JP H0256431U JP 13585188 U JP13585188 U JP 13585188U JP 13585188 U JP13585188 U JP 13585188U JP H0256431 U JPH0256431 U JP H0256431U
- Authority
- JP
- Japan
- Prior art keywords
- resist coating
- coating device
- exhaust duct
- exhausting
- spin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011248 coating agent Substances 0.000 claims description 4
- 238000000576 coating method Methods 0.000 claims description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 1
- 229920002120 photoresistant polymer Polymers 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 229910052710 silicon Inorganic materials 0.000 claims 1
- 239000010703 silicon Substances 0.000 claims 1
- 238000004528 spin coating Methods 0.000 claims 1
Landscapes
- Coating Apparatus (AREA)
Description
第１図はこの考案の一実施例によるレジスト塗
布装置を示す全体図。第２図は従来のレジスト塗
布装置を示す全体図である。図中、２１は排気ダ
クトである。なお、各図中同一符号は同一又は相
当部分を示す。
布装置を示す全体図。第２図は従来のレジスト塗
布装置を示す全体図である。図中、２１は排気ダ
クトである。なお、各図中同一符号は同一又は相
当部分を示す。
Claims (1)
- 半導体シリコンウエハ上にフオトレジスト液を
回転塗布するレジスト塗布装置において、装置全
体を排気する排気ダクトを設けたことを特徴とす
るレジスト塗布装置。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13585188U JPH0256431U (ja) | 1988-10-17 | 1988-10-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13585188U JPH0256431U (ja) | 1988-10-17 | 1988-10-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0256431U true JPH0256431U (ja) | 1990-04-24 |
Family
ID=31395823
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13585188U Pending JPH0256431U (ja) | 1988-10-17 | 1988-10-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0256431U (ja) |
-
1988
- 1988-10-17 JP JP13585188U patent/JPH0256431U/ja active Pending