JPH025754U - - Google Patents

Info

Publication number
JPH025754U
JPH025754U JP8341588U JP8341588U JPH025754U JP H025754 U JPH025754 U JP H025754U JP 8341588 U JP8341588 U JP 8341588U JP 8341588 U JP8341588 U JP 8341588U JP H025754 U JPH025754 U JP H025754U
Authority
JP
Japan
Prior art keywords
shadow mask
substrate
stage
grating
covers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8341588U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8341588U priority Critical patent/JPH025754U/ja
Publication of JPH025754U publication Critical patent/JPH025754U/ja
Pending legal-status Critical Current

Links

Description

【図面の簡単な説明】
第１図は本考案の実施例１を示す側面図、第２
図は第１図のシヤドウマスクを示す正面図、第３
図は実施例２におけるシヤドウマスクを示す正面
図である。 １…シヤドウマスク、２…基板、３…ウエハス
テージ、４…Ｙステージ、５…Ｘステージ。

Claims (1)

    【実用新案登録請求の範囲】
  1. 基板上のグレーテイングが形成される部分のみ
    を覆うシヤドウマスクと、該シヤドウマスクに対
    して基板を任意の位置に移動させるＸ―Ｙステー
    ジとを有することを特徴とする干渉露光装置。
JP8341588U 1988-06-23 1988-06-23 Pending JPH025754U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8341588U JPH025754U (ja) 1988-06-23 1988-06-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8341588U JPH025754U (ja) 1988-06-23 1988-06-23

Publications (1)

Publication Number Publication Date
JPH025754U true JPH025754U (ja) 1990-01-16

Family

ID=31308134

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8341588U Pending JPH025754U (ja) 1988-06-23 1988-06-23

Country Status (1)

Country Link
JP (1) JPH025754U (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0561397A (ja) * 1991-08-29 1993-03-12 Fujitsu Ltd ホログラム描画装置
JPH0572959A (ja) * 1991-09-17 1993-03-26 Fujitsu Ltd ホログラム描画装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0561397A (ja) * 1991-08-29 1993-03-12 Fujitsu Ltd ホログラム描画装置
JPH0572959A (ja) * 1991-09-17 1993-03-26 Fujitsu Ltd ホログラム描画装置

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