JPS62161250U - - Google Patents
Info
- Publication number
- JPS62161250U JPS62161250U JP1986050678U JP5067886U JPS62161250U JP S62161250 U JPS62161250 U JP S62161250U JP 1986050678 U JP1986050678 U JP 1986050678U JP 5067886 U JP5067886 U JP 5067886U JP S62161250 U JPS62161250 U JP S62161250U
- Authority
- JP
- Japan
- Prior art keywords
- light shielding
- shielding material
- embedded
- utility
- scope
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000463 material Substances 0.000 claims description 2
- 230000003287 optical effect Effects 0.000 claims description 2
- 239000000758 substrate Substances 0.000 claims description 2
- 230000007261 regionalization Effects 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 description 1
Description
第１図は本考案の一実施例に係る露光用マスク
の一部切欠側面図、第２図は露光用マスクの製造
方法を説明するための側面図、第３図は従来の光
マスクの一部切欠側面図である。 １……マスク基板、２……遮光材。
の一部切欠側面図、第２図は露光用マスクの製造
方法を説明するための側面図、第３図は従来の光
マスクの一部切欠側面図である。 １……マスク基板、２……遮光材。
Claims (1)
- パターン形成用の遮光材が透光性のマスク基板
に埋設されたことを特徴とする光学マスク。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986050678U JPS62161250U (ja) | 1986-04-03 | 1986-04-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986050678U JPS62161250U (ja) | 1986-04-03 | 1986-04-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62161250U true JPS62161250U (ja) | 1987-10-14 |
Family
ID=30874259
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986050678U Pending JPS62161250U (ja) | 1986-04-03 | 1986-04-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62161250U (ja) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5746243A (en) * | 1980-09-04 | 1982-03-16 | Nec Corp | Optical mask |
| JPS57119348A (en) * | 1981-01-17 | 1982-07-24 | Mitsubishi Electric Corp | Hard mask |
| JPS597952A (ja) * | 1982-07-06 | 1984-01-17 | Nec Corp | 半導体装置製造用フオトマスク |
-
1986
- 1986-04-03 JP JP1986050678U patent/JPS62161250U/ja active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5746243A (en) * | 1980-09-04 | 1982-03-16 | Nec Corp | Optical mask |
| JPS57119348A (en) * | 1981-01-17 | 1982-07-24 | Mitsubishi Electric Corp | Hard mask |
| JPS597952A (ja) * | 1982-07-06 | 1984-01-17 | Nec Corp | 半導体装置製造用フオトマスク |