JPS62192636U - - Google Patents

Info

Publication number
JPS62192636U
JPS62192636U JP8045086U JP8045086U JPS62192636U JP S62192636 U JPS62192636 U JP S62192636U JP 8045086 U JP8045086 U JP 8045086U JP 8045086 U JP8045086 U JP 8045086U JP S62192636 U JPS62192636 U JP S62192636U
Authority
JP
Japan
Prior art keywords
output shaft
electric motor
processing apparatus
developing processing
sucking
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8045086U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8045086U priority Critical patent/JPS62192636U/ja
Publication of JPS62192636U publication Critical patent/JPS62192636U/ja
Pending legal-status Critical Current

Links

Description

【図面の簡単な説明】
第１図は本考案に係る現像処理装置を示す断面
図、第２図は従来の現像処理装置を示す断面図で
ある。 １……電動機、１ａ……出力軸、４……ウエハ
チヤツク、６……半導体ウエハ、１１……フアン
。

Claims (1)

    【実用新案登録請求の範囲】
  1. 電動機用出力軸の先端部に固定され半導体ウエ
    ハを吸着保持するウエハチヤツクを備えた現像処
    理装置において、前記電動機用出力軸の軸線上に
    冷却用のフアンを取り付けたことを特徴とする現
    像処理装置。
JP8045086U 1986-05-28 1986-05-28 Pending JPS62192636U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8045086U JPS62192636U (ja) 1986-05-28 1986-05-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8045086U JPS62192636U (ja) 1986-05-28 1986-05-28

Publications (1)

Publication Number Publication Date
JPS62192636U true JPS62192636U (ja) 1987-12-08

Family

ID=30931265

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8045086U Pending JPS62192636U (ja) 1986-05-28 1986-05-28

Country Status (1)

Country Link
JP (1) JPS62192636U (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01220826A (ja) * 1988-02-29 1989-09-04 Tokyo Electron Ltd 半導体ウエハ処理装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01220826A (ja) * 1988-02-29 1989-09-04 Tokyo Electron Ltd 半導体ウエハ処理装置

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