JPH0423140U - - Google Patents

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Publication number
JPH0423140U
JPH0423140U JP6514190U JP6514190U JPH0423140U JP H0423140 U JPH0423140 U JP H0423140U JP 6514190 U JP6514190 U JP 6514190U JP 6514190 U JP6514190 U JP 6514190U JP H0423140 U JPH0423140 U JP H0423140U
Authority
JP
Japan
Prior art keywords
semiconductor substrate
pins
holding table
holding
pin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6514190U
Other languages
English (en)
Other versions
JP2504116Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6514190U priority Critical patent/JP2504116Y2/ja
Publication of JPH0423140U publication Critical patent/JPH0423140U/ja
Application granted granted Critical
Publication of JP2504116Y2 publication Critical patent/JP2504116Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Description

【図面の簡単な説明】
第１図は本考案の一実施例を示す要部模式図、
第２図は従来の処理装置のウエーハ保持部の要部
模式図、である。 図中、１はウエーハ（半導体基板）、１１，２
１は保持台、１２はピン、１２Ａは端面、１３は
熱電対（温度測定手段）、である。

Claims (1)

  1. 【実用新案登録請求の範囲】 半導体基板１を保持台１１に保持してこれを所
    望の温度で処理する装置であつて、 該半導体基板１を該保持台１１にクランプする
    三個以上のピン１２を有し、 該ピン１２の端面１２Ａは斜面をなして該半導
    体基板１の外周エツジに接する構造を有し、 該ピン１２の少なくとも一個は温度測定手段１
    ３を備えていることを特徴とする半導体製造装置
    。
JP6514190U 1990-06-20 1990-06-20 半導体製造装置 Expired - Lifetime JP2504116Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6514190U JP2504116Y2 (ja) 1990-06-20 1990-06-20 半導体製造装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6514190U JP2504116Y2 (ja) 1990-06-20 1990-06-20 半導体製造装置

Publications (2)

Publication Number Publication Date
JPH0423140U true JPH0423140U (ja) 1992-02-26
JP2504116Y2 JP2504116Y2 (ja) 1996-07-10

Family

ID=31596709

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6514190U Expired - Lifetime JP2504116Y2 (ja) 1990-06-20 1990-06-20 半導体製造装置

Country Status (1)

Country Link
JP (1) JP2504116Y2 (ja)

Also Published As

Publication number Publication date
JP2504116Y2 (ja) 1996-07-10

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