JPS63157054U - - Google Patents
Info
- Publication number
- JPS63157054U JPS63157054U JP4928887U JP4928887U JPS63157054U JP S63157054 U JPS63157054 U JP S63157054U JP 4928887 U JP4928887 U JP 4928887U JP 4928887 U JP4928887 U JP 4928887U JP S63157054 U JPS63157054 U JP S63157054U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor
- manufacturing equipment
- substrate
- belt
- backside
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 6
- 239000000758 substrate Substances 0.000 claims description 4
- 238000004519 manufacturing process Methods 0.000 claims description 3
- 230000032258 transport Effects 0.000 claims 1
Landscapes
- Belt Conveyors (AREA)
- Delivering By Means Of Belts And Rollers (AREA)
Description
第１図は本考案の一実施例を説明する為の半導
体製造装置の搬送部の正面図Ａ及び側面図Ｂであ
る。 尚、図において、１……滑車、２……搬送ベル
ト、３……半導体基板、である。
体製造装置の搬送部の正面図Ａ及び側面図Ｂであ
る。 尚、図において、１……滑車、２……搬送ベル
ト、３……半導体基板、である。
Claims (1)
- 半導体基板の製造装置に於いて、半導体基板を
、半導体集積回路装置の形成に必要な処理を行な
う処理部と処理部との間を搬送するベルトに於い
て、ベルトの表面に凹凸があり、半導体基板裏面
との接触面積が非常に小さいことを特徴とする半
導体製造装置の搬送用ベルト。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4928887U JPS63157054U (ja) | 1987-03-31 | 1987-03-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4928887U JPS63157054U (ja) | 1987-03-31 | 1987-03-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63157054U true JPS63157054U (ja) | 1988-10-14 |
Family
ID=30871596
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4928887U Pending JPS63157054U (ja) | 1987-03-31 | 1987-03-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63157054U (ja) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009026224A (ja) * | 2007-07-23 | 2009-02-05 | Canon Machinery Inc | カード搬送装置 |
| WO2018124632A1 (ko) * | 2016-12-26 | 2018-07-05 | 주식회사 한화 | 광기전력 소자 제조 장치 및 제조 방법 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58200551A (ja) * | 1982-05-19 | 1983-11-22 | Hitachi Ltd | ウエハ搬送装置 |
-
1987
- 1987-03-31 JP JP4928887U patent/JPS63157054U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58200551A (ja) * | 1982-05-19 | 1983-11-22 | Hitachi Ltd | ウエハ搬送装置 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009026224A (ja) * | 2007-07-23 | 2009-02-05 | Canon Machinery Inc | カード搬送装置 |
| WO2018124632A1 (ko) * | 2016-12-26 | 2018-07-05 | 주식회사 한화 | 광기전력 소자 제조 장치 및 제조 방법 |