JPS62172153U - - Google Patents

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Publication number
JPS62172153U
JPS62172153U JP6130786U JP6130786U JPS62172153U JP S62172153 U JPS62172153 U JP S62172153U JP 6130786 U JP6130786 U JP 6130786U JP 6130786 U JP6130786 U JP 6130786U JP S62172153 U JPS62172153 U JP S62172153U
Authority
JP
Japan
Prior art keywords
wafer
carrier case
integrated circuit
storage part
semiconductor integrated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6130786U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6130786U priority Critical patent/JPS62172153U/ja
Publication of JPS62172153U publication Critical patent/JPS62172153U/ja
Pending legal-status Critical Current

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Description

【図面の簡単な説明】
第１図はこの考案の一実施例によるキヤリアケ
ースの上面図、第２図はその断面図、第３図は従
来のキヤリアケースの外観図、第４図は従来のキ
ヤリアケースの上面図、第５図はその側面図、第
６図は半導体集積回路ウエハ製造装置の概略図で
ある。 図中、１はキヤリアケース、２はウエハ収納部
、４はウエハ、１０は球面状の切込みである。尚
、図中同一符号は同一又は相当部分を示す。

Claims (1)

    【実用新案登録請求の範囲】
  1. 半導体集積回路ウエハを収納するキヤリアケー
    スにおいて、ウエハの両側を載置して保持するウ
    エハ収納部に、ウエハとほぼ同径の球面状の切込
    みを設けたことを特徴とするウエハのキヤリアケ
    ース。
JP6130786U 1986-04-21 1986-04-21 Pending JPS62172153U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6130786U JPS62172153U (ja) 1986-04-21 1986-04-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6130786U JPS62172153U (ja) 1986-04-21 1986-04-21

Publications (1)

Publication Number Publication Date
JPS62172153U true JPS62172153U (ja) 1987-10-31

Family

ID=30894522

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6130786U Pending JPS62172153U (ja) 1986-04-21 1986-04-21

Country Status (1)

Country Link
JP (1) JPS62172153U (ja)

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