JPS58138340U - ウエハの洗浄・エツチング用キヤリア - Google Patents

ウエハの洗浄・エツチング用キヤリア

Info

Publication number
JPS58138340U
JPS58138340U JP1982036024U JP3602482U JPS58138340U JP S58138340 U JPS58138340 U JP S58138340U JP 1982036024 U JP1982036024 U JP 1982036024U JP 3602482 U JP3602482 U JP 3602482U JP S58138340 U JPS58138340 U JP S58138340U
Authority
JP
Japan
Prior art keywords
carrier
cleaning
etching
etching wafers
wafers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1982036024U
Other languages
English (en)
Inventor
相合　征一郎
Original Assignee
黒谷　信子
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 黒谷　信子 filed Critical 黒谷　信子
Priority to JP1982036024U priority Critical patent/JPS58138340U/ja
Priority to US06/407,732 priority patent/US4500080A/en
Publication of JPS58138340U publication Critical patent/JPS58138340U/ja
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00—Etching metallic material by chemical means
    • C23F1/08—Apparatus, e.g. for photomechanical printing surfaces

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。

Description

【図面の簡単な説明】
第１図は本考案の一例によるウェハの洗浄・エツチング
用キャリアの斜視図、第２図は本考案のキャリアの他の
実施例の斜視図、そして第３図は工程におけるキャリア
に備えられた照合体の取扱いを示す斜視図である。 図中、１・・・キャリア、２・・・保持部、３・・・照
合体、４・・・収納ボックス。

Claims (1)

    【実用新案登録請求の範囲】
  1. １０ツトの所定枚数の半導体ウェハを洗浄およびエツチ
    ングの各工程に移動するため前記１０ツトのウェハを支
    持するキャリアにおいて、前記キャリアまたはその収納
    ボックスに備えられた後記照合体のための保持部と、前
    記保持部に取外し自在に支持された照合体を含み、前記
    照合体はマイクロプロセッサおかびメモリを構成する半
    導体チップを含んだものであることを特徴とするウェハ
    の洗浄・エツチング用キャリア。
JP1982036024U 1982-03-15 1982-03-15 ウエハの洗浄・エツチング用キヤリア Pending JPS58138340U (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP1982036024U JPS58138340U (ja) 1982-03-15 1982-03-15 ウエハの洗浄・エツチング用キヤリア
US06/407,732 US4500080A (en) 1982-03-15 1982-08-13 Carrier for cleaning and etching wafers

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1982036024U JPS58138340U (ja) 1982-03-15 1982-03-15 ウエハの洗浄・エツチング用キヤリア

Publications (1)

Publication Number Publication Date
JPS58138340U true JPS58138340U (ja) 1983-09-17

Family

ID=12458151

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1982036024U Pending JPS58138340U (ja) 1982-03-15 1982-03-15 ウエハの洗浄・エツチング用キヤリア

Country Status (2)

Country Link
US (1) US4500080A (ja)
JP (1) JPS58138340U (ja)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60262736A (ja) * 1984-06-11 1985-12-26 Omron Tateisi Electronics Co 紙幣類放出機のカ−トリツジ
US4792865A (en) * 1984-08-24 1988-12-20 Eastman Kodak Company Disk container supporting a detachable memory
US5009240A (en) * 1989-07-07 1991-04-23 United States Of America Wafer cleaning method
US6164530A (en) * 1994-04-08 2000-12-26 Fluoroware, Inc. Disk carrier with transponder
US5931721A (en) 1994-11-07 1999-08-03 Sumitomo Heavy Industries, Ltd. Aerosol surface processing
US5967156A (en) * 1994-11-07 1999-10-19 Krytek Corporation Processing a surface
US5770842A (en) * 1995-06-08 1998-06-23 Dressen; Larry G. Location monitoring of wafer batches
DE19922498A1 (de) * 1999-05-15 2000-11-30 Hans Moritz Vorrichtung zum einseitigen Ätzen einer Halbleiterscheibe
US6616034B2 (en) * 2001-12-10 2003-09-09 Fortrend Taiwan Scientific Corporation Radio frequency identification device
US7328836B2 (en) * 2004-02-03 2008-02-12 Taiwan Semiconductor Manufacturing Co., Ltd. Smart tag holder and cover housing

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5434777A (en) * 1977-08-24 1979-03-14 Hitachi Ltd Mask aligner
JPS5671949A (en) * 1979-11-15 1981-06-15 Nissin Electric Co Ltd Specimen carrier for charge particle injector

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1506926A (en) * 1922-10-12 1924-09-02 Gunter Clarke Receptacle for toracco and cigarette papers
US3868057A (en) * 1971-06-29 1975-02-25 Robert C Chavez Credit card and indentity verification system
US3934122A (en) * 1974-08-15 1976-01-20 Riccitelli James A Electronic security card and system for authenticating card ownership
FR2403597A1 (fr) * 1977-09-16 1979-04-13 Cii Honeywell Bull Perfectionnements aux systemes de comptabilisation d'unites homogenes predeterminees

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5434777A (en) * 1977-08-24 1979-03-14 Hitachi Ltd Mask aligner
JPS5671949A (en) * 1979-11-15 1981-06-15 Nissin Electric Co Ltd Specimen carrier for charge particle injector

Also Published As

Publication number Publication date
US4500080A (en) 1985-02-19

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