JPS63159821U - - Google Patents

Info

Publication number
JPS63159821U
JPS63159821U JP5362187U JP5362187U JPS63159821U JP S63159821 U JPS63159821 U JP S63159821U JP 5362187 U JP5362187 U JP 5362187U JP 5362187 U JP5362187 U JP 5362187U JP S63159821 U JPS63159821 U JP S63159821U
Authority
JP
Japan
Prior art keywords
jig
core tube
furnace core
semiconductor device
device manufacturing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5362187U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5362187U priority Critical patent/JPS63159821U/ja
Publication of JPS63159821U publication Critical patent/JPS63159821U/ja
Pending legal-status Critical Current

Links

Description

【図面の簡単な説明】
第１図は、本考案を用いた縦型熱処理装置内に
納められたウエーハ装填治具であり、炉芯管上方
よりウエーハ装填治具を挿入する構造についての
ａが正面の縦断面図で、ｂが側面の縦断面図であ
る。第２図は、同一構造のウエーハ装填治具を用
いた縦型熱処理装置でウエーハ装填治具を炉芯管
下方より挿入する方式の正面の縦断面図である。 １……外気しやへい治具、２……炉芯管、３…
…ウエーハ、４……ウエーハ装填治具、５……ウ
エーハ装填治具支持治具、６……処理気体注入口
、７……ウエーハ装填治具の持ち上げ（着脱用）
穴。

Claims (1)

    【実用新案登録請求の範囲】
  1. 半導体素子製造における炉芯管を地面に垂直に
    設置する熱処理装置において、ウエーハの面が重
    力方向に対し、ほぼ平行に装填されることを特徴
    とし、かつ炉芯管中に挿入される治具がウエーハ
    装填治具と、該装填治具を支持する治具が任意に
    着脱可能な様に分離されていることを特徴とする
    半導体素子製造装置。
JP5362187U 1987-04-08 1987-04-08 Pending JPS63159821U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5362187U JPS63159821U (ja) 1987-04-08 1987-04-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5362187U JPS63159821U (ja) 1987-04-08 1987-04-08

Publications (1)

Publication Number Publication Date
JPS63159821U true JPS63159821U (ja) 1988-10-19

Family

ID=30879858

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5362187U Pending JPS63159821U (ja) 1987-04-08 1987-04-08

Country Status (1)

Country Link
JP (1) JPS63159821U (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0273732U (ja) * 1988-11-28 1990-06-05

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61125013A (ja) * 1984-11-16 1986-06-12 ヘレウス・クアルツシユメルツエ・ゲゼルシヤフト・ミツト・ベシユレンクタ−・ハフツング 半導体物質熱処理用炉
JPS62281321A (ja) * 1986-05-30 1987-12-07 Fukui Shinetsu Sekiei:Kk ウエハ処理装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61125013A (ja) * 1984-11-16 1986-06-12 ヘレウス・クアルツシユメルツエ・ゲゼルシヤフト・ミツト・ベシユレンクタ−・ハフツング 半導体物質熱処理用炉
JPS62281321A (ja) * 1986-05-30 1987-12-07 Fukui Shinetsu Sekiei:Kk ウエハ処理装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0273732U (ja) * 1988-11-28 1990-06-05

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