JPS63119234U - - Google Patents
Info
- Publication number
- JPS63119234U JPS63119234U JP1105187U JP1105187U JPS63119234U JP S63119234 U JPS63119234 U JP S63119234U JP 1105187 U JP1105187 U JP 1105187U JP 1105187 U JP1105187 U JP 1105187U JP S63119234 U JPS63119234 U JP S63119234U
- Authority
- JP
- Japan
- Prior art keywords
- core tube
- furnace core
- jig
- heat treatment
- wafer loading
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 2
- 238000004519 manufacturing process Methods 0.000 claims 2
- 239000004065 semiconductor Substances 0.000 claims 2
- 239000012495 reaction gas Substances 0.000 description 1
Landscapes
- Muffle Furnaces And Rotary Kilns (AREA)
Description
第１図は本考案を用いた横型熱処理装置内に納
められた炉芯管キヤツプの側面の縦断面図である
。 １……反応気体注入口、２……ウエーハ装填治
具、３……ウエーハ、４……炉芯管、５……炉芯
管キヤツプ、６……炉芯管キヤツプ回転治具、７
……ウエーハ装填治具移動装置固定部。
められた炉芯管キヤツプの側面の縦断面図である
。 １……反応気体注入口、２……ウエーハ装填治
具、３……ウエーハ、４……炉芯管、５……炉芯
管キヤツプ、６……炉芯管キヤツプ回転治具、７
……ウエーハ装填治具移動装置固定部。
Claims (1)
- 半導体素子製造における炉芯管を地面に水平に
設置する熱処理装置のウエーハ装填治具を炉芯管
内へ入出するための治具において炉芯管底部を回
転し、かつ支持するための部品を有することを特
徴とする半導体素子製造装置。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1105187U JPS63119234U (ja) | 1987-01-27 | 1987-01-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1105187U JPS63119234U (ja) | 1987-01-27 | 1987-01-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63119234U true JPS63119234U (ja) | 1988-08-02 |
Family
ID=30797918
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1105187U Pending JPS63119234U (ja) | 1987-01-27 | 1987-01-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63119234U (ja) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS597913A (ja) * | 1982-07-07 | 1984-01-17 | Fujitsu Ltd | 光フアイバ固定装置およびその製造方法 |
-
1987
- 1987-01-27 JP JP1105187U patent/JPS63119234U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS597913A (ja) * | 1982-07-07 | 1984-01-17 | Fujitsu Ltd | 光フアイバ固定装置およびその製造方法 |