JPS628633U - - Google Patents

Info

Publication number
JPS628633U
JPS628633U JP10031885U JP10031885U JPS628633U JP S628633 U JPS628633 U JP S628633U JP 10031885 U JP10031885 U JP 10031885U JP 10031885 U JP10031885 U JP 10031885U JP S628633 U JPS628633 U JP S628633U
Authority
JP
Japan
Prior art keywords
reaction tube
semiconductor heat
wafer loading
unloading section
scavenger box
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10031885U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10031885U priority Critical patent/JPS628633U/ja
Publication of JPS628633U publication Critical patent/JPS628633U/ja
Pending legal-status Critical Current

Links

Description

【図面の簡単な説明】
図面は、この考案の係るスカベンジヤーボツク
スの装着された、縦形半導体熱処理装置の一部破
断の概略正面図である。 １０：半導体熱処理装置のスカベンジヤーボツ
クス、１２：フイルター、１４：炉体、１６：空
気の導入孔、１８：ブロアー、２２：反応管、２
４：反応管のウエーハ導入部、２６：ウエーハ、
２８：ウエーハボート、３６：排気管。

Claims (1)

    【実用新案登録請求の範囲】
  1. 反応管のウエーハ搬出入部に設けられた半導体
    熱処理装置のスカベンジヤーボツクスにおいて、
    空気導入部にフイルターを設け、クリーンルーム
    の空気をフイルターで浄化した後、反応管のウエ
    ーハ搬出入部に噴出する半導体熱処理装置のスカ
    ベンジヤーボツクス。
JP10031885U 1985-07-01 1985-07-01 Pending JPS628633U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10031885U JPS628633U (ja) 1985-07-01 1985-07-01

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10031885U JPS628633U (ja) 1985-07-01 1985-07-01

Publications (1)

Publication Number Publication Date
JPS628633U true JPS628633U (ja) 1987-01-19

Family

ID=30970029

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10031885U Pending JPS628633U (ja) 1985-07-01 1985-07-01

Country Status (1)

Country Link
JP (1) JPS628633U (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6421413U (ja) * 1987-07-29 1989-02-02
JPH01170014A (ja) * 1987-12-01 1989-07-05 Varian Assoc Inc 水平層状空気流ワークステーション
JPH07297145A (ja) * 1995-03-02 1995-11-10 Tokyo Electron Tohoku Ltd 熱処理装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS454207Y1 (ja) * 1966-06-15 1970-02-26
JPS4840366U (ja) * 1971-09-14 1973-05-22

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS454207Y1 (ja) * 1966-06-15 1970-02-26
JPS4840366U (ja) * 1971-09-14 1973-05-22

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6421413U (ja) * 1987-07-29 1989-02-02
JPH01170014A (ja) * 1987-12-01 1989-07-05 Varian Assoc Inc 水平層状空気流ワークステーション
JPH07297145A (ja) * 1995-03-02 1995-11-10 Tokyo Electron Tohoku Ltd 熱処理装置

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