JPS6339894B2 - - Google Patents

Info

Publication number
JPS6339894B2
JPS6339894B2 JP61213822A JP21382286A JPS6339894B2 JP S6339894 B2 JPS6339894 B2 JP S6339894B2 JP 61213822 A JP61213822 A JP 61213822A JP 21382286 A JP21382286 A JP 21382286A JP S6339894 B2 JPS6339894 B2 JP S6339894B2
Authority
JP
Japan
Prior art keywords
ion beam
ion
focuses
circuit pattern
aperture
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP61213822A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6284518A (ja
Inventor
Takeoki Myauchi
Mikio Ppongo
Masao Mitani
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP61213822A priority Critical patent/JPS6284518A/ja
Publication of JPS6284518A publication Critical patent/JPS6284518A/ja
Publication of JPS6339894B2 publication Critical patent/JPS6339894B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Welding Or Cutting Using Electron Beams (AREA)
  • Drying Of Semiconductors (AREA)
JP61213822A 1986-09-12 1986-09-12 イオンビ−ム加工装置 Granted JPS6284518A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61213822A JPS6284518A (ja) 1986-09-12 1986-09-12 イオンビ−ム加工装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61213822A JPS6284518A (ja) 1986-09-12 1986-09-12 イオンビ−ム加工装置

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP5711379A Division JPS55150225A (en) 1979-05-11 1979-05-11 Method of correcting white spot fault of photomask

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP9676891A Division JPH0664339B2 (ja) 1991-04-26 1991-04-26 イオンビーム加工方法

Publications (2)

Publication Number Publication Date
JPS6284518A JPS6284518A (ja) 1987-04-18
JPS6339894B2 true JPS6339894B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-08-08

Family

ID=16645601

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61213822A Granted JPS6284518A (ja) 1986-09-12 1986-09-12 イオンビ−ム加工装置

Country Status (1)

Country Link
JP (1) JPS6284518A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6753253B1 (en) * 1986-06-18 2004-06-22 Hitachi, Ltd. Method of making wiring and logic corrections on a semiconductor device by use of focused ion beams
DE10230755A1 (de) * 2002-07-09 2004-01-22 Carl Zeiss Jena Gmbh Anordnung zur Herstellung von Photomasken

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3699334A (en) * 1969-06-16 1972-10-17 Kollsman Instr Corp Apparatus using a beam of positive ions for controlled erosion of surfaces
GB1505623A (en) * 1975-07-11 1978-03-30 Heidelberger Druckmasch Ag Transfer drum and drum blanket for sheet-fed rotary printing presses
US4085330A (en) * 1976-07-08 1978-04-18 Burroughs Corporation Focused ion beam mask maker
JPS5371563A (en) * 1976-12-08 1978-06-26 Hitachi Ltd Automatic inspection correcting method for mask

Also Published As

Publication number Publication date
JPS6284518A (ja) 1987-04-18

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