JPS633446B2 - - Google Patents
Info
- Publication number
- JPS633446B2 JPS633446B2 JP15986778A JP15986778A JPS633446B2 JP S633446 B2 JPS633446 B2 JP S633446B2 JP 15986778 A JP15986778 A JP 15986778A JP 15986778 A JP15986778 A JP 15986778A JP S633446 B2 JPS633446 B2 JP S633446B2
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- jig
- semiconductor
- furnace
- wafers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 235000012431 wafers Nutrition 0.000 claims description 86
- 239000004065 semiconductor Substances 0.000 claims description 30
- 238000010438 heat treatment Methods 0.000 claims description 10
- 238000000034 method Methods 0.000 claims description 4
- 238000009792 diffusion process Methods 0.000 description 10
- 239000007789 gas Substances 0.000 description 9
- 239000012535 impurity Substances 0.000 description 5
- 238000007796 conventional method Methods 0.000 description 4
- 239000012159 carrier gas Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 230000003321 amplification Effects 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 239000000376 reactant Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15986778A JPS5588323A (en) | 1978-12-27 | 1978-12-27 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15986778A JPS5588323A (en) | 1978-12-27 | 1978-12-27 | Manufacture of semiconductor device |
Related Child Applications (4)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP29056485A Division JPS61172325A (ja) | 1985-12-25 | 1985-12-25 | 縦型熱処理炉 |
| JP16792686A Division JPS6211224A (ja) | 1986-07-18 | 1986-07-18 | 半導体ウエハの熱処理方法 |
| JP15110287A Division JPS6323313A (ja) | 1987-06-19 | 1987-06-19 | 半導体ウエハの熱処理方法 |
| JP191891A Division JPH03273620A (ja) | 1991-01-11 | 1991-01-11 | 半導体ウエハの熱処理方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5588323A JPS5588323A (en) | 1980-07-04 |
| JPS633446B2 true JPS633446B2 (en, 2012) | 1988-01-23 |
Family
ID=15702940
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15986778A Granted JPS5588323A (en) | 1978-12-27 | 1978-12-27 | Manufacture of semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5588323A (en, 2012) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0267137A (ja) * | 1988-09-02 | 1990-03-07 | Komori Printing Mach Co Ltd | 印刷胴の自動ゴミ取り装置 |
Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58108735A (ja) * | 1981-12-23 | 1983-06-28 | Fujitsu Ltd | 縦型反応管用バスケツト |
| JPS58110034A (ja) * | 1981-12-24 | 1983-06-30 | Fujitsu Ltd | 縦型気相エピタキシヤル装置 |
| JPS5974621A (ja) * | 1982-10-21 | 1984-04-27 | Stanley Electric Co Ltd | 不純物拡散法及びこれに使用する治具 |
| JPS59232434A (ja) * | 1983-06-16 | 1984-12-27 | Nippon Telegr & Teleph Corp <Ntt> | 真空処理装置に於けるワ−ク回転装置 |
| JPS6127625A (ja) * | 1984-07-18 | 1986-02-07 | Deisuko Saiyaa Japan:Kk | 半導体物品の熱処理方法及びこれに使用する装置 |
| JPH0528755Y2 (en, 2012) * | 1986-06-24 | 1993-07-23 | ||
| JPS6211224A (ja) * | 1986-07-18 | 1987-01-20 | Hitachi Ltd | 半導体ウエハの熱処理方法 |
| JPH0258825A (ja) * | 1988-08-24 | 1990-02-28 | Nec Kyushu Ltd | 縦型減圧ｃｖｄ装置 |
| JPH02152224A (ja) * | 1988-12-02 | 1990-06-12 | Toshiba Corp | 気相成長装置 |
| JPH0467619A (ja) * | 1990-07-09 | 1992-03-03 | Nec Kyushu Ltd | 半導体製造装置 |
| JPH05157006A (ja) * | 1991-11-29 | 1993-06-22 | Kubota Corp | エンジンの排熱回収装置 |
| JPH06349738A (ja) * | 1993-06-08 | 1994-12-22 | Nec Corp | 縦型減圧ｃｖｄ装置 |
-
1978
- 1978-12-27 JP JP15986778A patent/JPS5588323A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0267137A (ja) * | 1988-09-02 | 1990-03-07 | Komori Printing Mach Co Ltd | 印刷胴の自動ゴミ取り装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5588323A (en) | 1980-07-04 |
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