JPS6331536A - プラズマ気相反応による微粒子製造装置 - Google Patents

プラズマ気相反応による微粒子製造装置

Info

Publication number
JPS6331536A
JPS6331536A JP17383386A JP17383386A JPS6331536A JP S6331536 A JPS6331536 A JP S6331536A JP 17383386 A JP17383386 A JP 17383386A JP 17383386 A JP17383386 A JP 17383386A JP S6331536 A JPS6331536 A JP S6331536A
Authority
JP
Japan
Prior art keywords
vacuum container
plasma
gas
electrode
raw material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17383386A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0410376B2 (enExample
Inventor
Isao Nakatani
功 中谷
Takao Furubayashi
孝夫 古林
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute for Materials Science
Original Assignee
National Research Institute for Metals
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by National Research Institute for Metals filed Critical National Research Institute for Metals
Priority to JP17383386A priority Critical patent/JPS6331536A/ja
Publication of JPS6331536A publication Critical patent/JPS6331536A/ja
Priority to US07/451,766 priority patent/US5012158A/en
Publication of JPH0410376B2 publication Critical patent/JPH0410376B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J12/00—Chemical processes in general for reacting gaseous media with gaseous media; Apparatus specially adapted therefor
    • B01J12/002—Chemical processes in general for reacting gaseous media with gaseous media; Apparatus specially adapted therefor carried out in the plasma state
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J2219/0894—Processes carried out in the presence of a plasma
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/19—Details relating to the geometry of the reactor
    • B01J2219/194—Details relating to the geometry of the reactor round
    • B01J2219/1941—Details relating to the geometry of the reactor round circular or disk-shaped
    • B01J2219/1942—Details relating to the geometry of the reactor round circular or disk-shaped spherical
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/32—Processing objects by plasma generation
    • H01J2237/33—Processing objects by plasma generation characterised by the type of processing
    • H01J2237/332—Coating

Landscapes

  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Compounds Of Iron (AREA)
  • Colloid Chemistry (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Lubricants (AREA)
  • Manufacture Of Metal Powder And Suspensions Thereof (AREA)
JP17383386A 1986-07-25 1986-07-25 プラズマ気相反応による微粒子製造装置 Granted JPS6331536A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP17383386A JPS6331536A (ja) 1986-07-25 1986-07-25 プラズマ気相反応による微粒子製造装置
US07/451,766 US5012158A (en) 1986-07-25 1989-12-18 Plasma CVD apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17383386A JPS6331536A (ja) 1986-07-25 1986-07-25 プラズマ気相反応による微粒子製造装置

Publications (2)

Publication Number Publication Date
JPS6331536A true JPS6331536A (ja) 1988-02-10
JPH0410376B2 JPH0410376B2 (enExample) 1992-02-25

Family

ID=15968001

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17383386A Granted JPS6331536A (ja) 1986-07-25 1986-07-25 プラズマ気相反応による微粒子製造装置

Country Status (1)

Country Link
JP (1) JPS6331536A (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02164443A (ja) * 1988-12-20 1990-06-25 Natl Res Inst For Metals プラズマ気相反応装置
JP2011050829A (ja) * 2009-08-31 2011-03-17 Teijin Ltd 微粒子の製造方法及びその製造装置
JP2011051814A (ja) * 2009-08-31 2011-03-17 Teijin Ltd 窒化鉄微粒子及びそれを含有するコロイド溶液

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0677326A4 (en) * 1992-12-28 1996-08-28 Kao Corp METHOD FOR PRODUCING FINE CERAMIC PARTICLES AND DEVICE THEREFOR.

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5825045A (ja) * 1981-08-07 1983-02-15 Nippon Telegr & Teleph Corp <Ntt> 静電形電子レンズ
JPS5884107A (ja) * 1982-09-24 1983-05-20 Shunpei Yamazaki プラズマ窒化法
JPS5941772A (ja) * 1982-08-31 1984-03-08 井上金属工業株式会社 有機溶剤塗工物の連続乾燥方法
JPS59145038A (ja) * 1983-02-07 1984-08-20 Agency Of Ind Science & Technol 粉体表面改質装置
JPS59162110A (ja) * 1983-02-28 1984-09-13 Nippon Denso Co Ltd 微粉末窒化珪素の製造方法
JPS61118136A (ja) * 1984-11-12 1986-06-05 Nippon Paint Co Ltd 表面処理法

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5825045A (ja) * 1981-08-07 1983-02-15 Nippon Telegr & Teleph Corp <Ntt> 静電形電子レンズ
JPS5941772A (ja) * 1982-08-31 1984-03-08 井上金属工業株式会社 有機溶剤塗工物の連続乾燥方法
JPS5884107A (ja) * 1982-09-24 1983-05-20 Shunpei Yamazaki プラズマ窒化法
JPS59145038A (ja) * 1983-02-07 1984-08-20 Agency Of Ind Science & Technol 粉体表面改質装置
JPS59162110A (ja) * 1983-02-28 1984-09-13 Nippon Denso Co Ltd 微粉末窒化珪素の製造方法
JPS61118136A (ja) * 1984-11-12 1986-06-05 Nippon Paint Co Ltd 表面処理法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02164443A (ja) * 1988-12-20 1990-06-25 Natl Res Inst For Metals プラズマ気相反応装置
JP2011050829A (ja) * 2009-08-31 2011-03-17 Teijin Ltd 微粒子の製造方法及びその製造装置
JP2011051814A (ja) * 2009-08-31 2011-03-17 Teijin Ltd 窒化鉄微粒子及びそれを含有するコロイド溶液

Also Published As

Publication number Publication date
JPH0410376B2 (enExample) 1992-02-25

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Legal Events

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