JPS63307200A - 単結晶ウエ−ハの製造方法 - Google Patents

単結晶ウエ−ハの製造方法

Info

Publication number
JPS63307200A
JPS63307200A JP14281687A JP14281687A JPS63307200A JP S63307200 A JPS63307200 A JP S63307200A JP 14281687 A JP14281687 A JP 14281687A JP 14281687 A JP14281687 A JP 14281687A JP S63307200 A JPS63307200 A JP S63307200A
Authority
JP
Japan
Prior art keywords
wafer
wafers
etching
single crystal
manufacturing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14281687A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0377160B2 (enrdf_load_stackoverflow
Inventor
Ken Ito
研 伊藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Chemical Co Ltd
Original Assignee
Shin Etsu Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Chemical Co Ltd filed Critical Shin Etsu Chemical Co Ltd
Priority to JP14281687A priority Critical patent/JPS63307200A/ja
Publication of JPS63307200A publication Critical patent/JPS63307200A/ja
Publication of JPH0377160B2 publication Critical patent/JPH0377160B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP14281687A 1987-06-08 1987-06-08 単結晶ウエ−ハの製造方法 Granted JPS63307200A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14281687A JPS63307200A (ja) 1987-06-08 1987-06-08 単結晶ウエ−ハの製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14281687A JPS63307200A (ja) 1987-06-08 1987-06-08 単結晶ウエ−ハの製造方法

Publications (2)

Publication Number Publication Date
JPS63307200A true JPS63307200A (ja) 1988-12-14
JPH0377160B2 JPH0377160B2 (enrdf_load_stackoverflow) 1991-12-09

Family

ID=15324294

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14281687A Granted JPS63307200A (ja) 1987-06-08 1987-06-08 単結晶ウエ−ハの製造方法

Country Status (1)

Country Link
JP (1) JPS63307200A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5340435A (en) * 1990-02-28 1994-08-23 Yatsuo Ito Bonded wafer and method of manufacturing it
JP2017190279A (ja) * 2016-04-15 2017-10-19 住友金属鉱山株式会社 非磁性ガーネット基板の製造方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5340435A (en) * 1990-02-28 1994-08-23 Yatsuo Ito Bonded wafer and method of manufacturing it
JP2017190279A (ja) * 2016-04-15 2017-10-19 住友金属鉱山株式会社 非磁性ガーネット基板の製造方法

Also Published As

Publication number Publication date
JPH0377160B2 (enrdf_load_stackoverflow) 1991-12-09

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