JPS6322672Y2 - - Google Patents
Info
- Publication number
- JPS6322672Y2 JPS6322672Y2 JP1983181117U JP18111783U JPS6322672Y2 JP S6322672 Y2 JPS6322672 Y2 JP S6322672Y2 JP 1983181117 U JP1983181117 U JP 1983181117U JP 18111783 U JP18111783 U JP 18111783U JP S6322672 Y2 JPS6322672 Y2 JP S6322672Y2
- Authority
- JP
- Japan
- Prior art keywords
- suction
- wafer
- vacuum
- tool
- semiconductor wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 235000012431 wafers Nutrition 0.000 claims description 52
- 239000004065 semiconductor Substances 0.000 claims description 13
- 229920003002 synthetic resin Polymers 0.000 claims description 6
- 239000000057 synthetic resin Substances 0.000 claims description 6
- 229920005989 resin Polymers 0.000 claims description 4
- 239000011347 resin Substances 0.000 claims description 4
- 239000007769 metal material Substances 0.000 claims description 2
- NBVXSUQYWXRMNV-UHFFFAOYSA-N fluoromethane Chemical compound FC NBVXSUQYWXRMNV-UHFFFAOYSA-N 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 229910001220 stainless steel Inorganic materials 0.000 description 5
- 239000010935 stainless steel Substances 0.000 description 5
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 3
- 229910052731 fluorine Inorganic materials 0.000 description 3
- 239000011737 fluorine Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18111783U JPS6088548U (ja) | 1983-11-22 | 1983-11-22 | 半導体ウエ−ハの真空吸着具 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18111783U JPS6088548U (ja) | 1983-11-22 | 1983-11-22 | 半導体ウエ−ハの真空吸着具 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6088548U JPS6088548U (ja) | 1985-06-18 |
JPS6322672Y2 true JPS6322672Y2 (ko) | 1988-06-22 |
Family
ID=30392542
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP18111783U Granted JPS6088548U (ja) | 1983-11-22 | 1983-11-22 | 半導体ウエ−ハの真空吸着具 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6088548U (ko) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0530030Y2 (ko) * | 1987-04-23 | 1993-07-30 | ||
US4773687A (en) * | 1987-05-22 | 1988-09-27 | American Telephone And Telegraph Company, At&T Technologies, Inc. | Wafer handler |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4957498A (ko) * | 1972-10-04 | 1974-06-04 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS52139767U (ko) * | 1976-04-16 | 1977-10-22 |
-
1983
- 1983-11-22 JP JP18111783U patent/JPS6088548U/ja active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4957498A (ko) * | 1972-10-04 | 1974-06-04 |
Also Published As
Publication number | Publication date |
---|---|
JPS6088548U (ja) | 1985-06-18 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US7052229B2 (en) | Alignment of semiconductor wafers and other articles | |
JPS61145839A (ja) | 半導体ウエ−ハの接着方法および接着治具 | |
JPS6322672Y2 (ko) | ||
JPH03270048A (ja) | 真空チャック | |
US11538712B2 (en) | Suction holder and holding mechanism for ring frame | |
JPS61140432A (ja) | ウエハ−等の保持装置 | |
JPH08143147A (ja) | 薄板状ワークの吸着装置 | |
JPH05343506A (ja) | ウェーハ用チャック | |
JPH0724560U (ja) | ワーク吸着具 | |
JP2754817B2 (ja) | ウエーハハンドリング装置 | |
JPH0511991Y2 (ko) | ||
JPH035395Y2 (ko) | ||
US20230352335A1 (en) | Transport hand and ring transport system using the same | |
JPH0698586B2 (ja) | ロボットハンド | |
JP2846423B2 (ja) | 円板のセンタリング装置 | |
JPH11116047A (ja) | 薄型基板搬送ロボットにおけるロボットハンド | |
JPH1012639A (ja) | ボンディングコレット | |
JP2000153455A (ja) | 真空吸着用ヘッド | |
JPH05326Y2 (ko) | ||
JPH0529149U (ja) | 真空ピンセツト | |
JPH10313045A (ja) | 半導体チップの保持具 | |
JPH01282834A (ja) | ウェハ移載用の吸着ハンド | |
JPH0423870Y2 (ko) | ||
JPH04105882A (ja) | 止め輪取付治具 | |
JPH08203982A (ja) | ウエハの搬送治具 |