JPS4957498A - - Google Patents
Info
- Publication number
- JPS4957498A JPS4957498A JP9902572A JP9902572A JPS4957498A JP S4957498 A JPS4957498 A JP S4957498A JP 9902572 A JP9902572 A JP 9902572A JP 9902572 A JP9902572 A JP 9902572A JP S4957498 A JPS4957498 A JP S4957498A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Gripping Jigs, Holding Jigs, And Positioning Jigs (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9902572A JPS4957498A (ko) | 1972-10-04 | 1972-10-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9902572A JPS4957498A (ko) | 1972-10-04 | 1972-10-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4957498A true JPS4957498A (ko) | 1974-06-04 |
Family
ID=14235707
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9902572A Pending JPS4957498A (ko) | 1972-10-04 | 1972-10-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS4957498A (ko) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5160765U (ko) * | 1974-11-08 | 1976-05-13 | ||
| JPS54177275U (ko) * | 1978-06-02 | 1979-12-14 | ||
| JPS5856440U (ja) * | 1981-10-13 | 1983-04-16 | 日本テキサス・インスツルメンツ株式会社 | バキユ−ムピンセツト |
| JPS5958936U (ja) * | 1982-10-14 | 1984-04-17 | 高橋 清 | 弗素樹脂製真空ピンセツト |
| JPS6088548U (ja) * | 1983-11-22 | 1985-06-18 | 三菱電機株式会社 | 半導体ウエ−ハの真空吸着具 |
| JPS6365640A (ja) * | 1986-09-05 | 1988-03-24 | Kokusai Electric Co Ltd | ウエハの着脱方法及び装置 |
| JPS63167418U (ko) * | 1987-04-23 | 1988-11-01 |
-
1972
- 1972-10-04 JP JP9902572A patent/JPS4957498A/ja active Pending
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5160765U (ko) * | 1974-11-08 | 1976-05-13 | ||
| JPS54177275U (ko) * | 1978-06-02 | 1979-12-14 | ||
| JPS5856440U (ja) * | 1981-10-13 | 1983-04-16 | 日本テキサス・インスツルメンツ株式会社 | バキユ−ムピンセツト |
| JPS6122772Y2 (ko) * | 1981-10-13 | 1986-07-08 | ||
| JPS5958936U (ja) * | 1982-10-14 | 1984-04-17 | 高橋 清 | 弗素樹脂製真空ピンセツト |
| JPS6317655Y2 (ko) * | 1982-10-14 | 1988-05-18 | ||
| JPS6088548U (ja) * | 1983-11-22 | 1985-06-18 | 三菱電機株式会社 | 半導体ウエ−ハの真空吸着具 |
| JPS6322672Y2 (ko) * | 1983-11-22 | 1988-06-22 | ||
| JPS6365640A (ja) * | 1986-09-05 | 1988-03-24 | Kokusai Electric Co Ltd | ウエハの着脱方法及び装置 |
| JPH0142138B2 (ko) * | 1986-09-05 | 1989-09-11 | Kokusai Denki Kk | |
| JPS63167418U (ko) * | 1987-04-23 | 1988-11-01 | ||
| JPH0530030Y2 (ko) * | 1987-04-23 | 1993-07-30 |