JPS52139767U - - Google Patents
Info
- Publication number
- JPS52139767U JPS52139767U JP4841176U JP4841176U JPS52139767U JP S52139767 U JPS52139767 U JP S52139767U JP 4841176 U JP4841176 U JP 4841176U JP 4841176 U JP4841176 U JP 4841176U JP S52139767 U JPS52139767 U JP S52139767U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Gripping Jigs, Holding Jigs, And Positioning Jigs (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4841176U JPS52139767U (ko) | 1976-04-16 | 1976-04-16 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4841176U JPS52139767U (ko) | 1976-04-16 | 1976-04-16 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS52139767U true JPS52139767U (ko) | 1977-10-22 |
Family
ID=28507620
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4841176U Pending JPS52139767U (ko) | 1976-04-16 | 1976-04-16 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52139767U (ko) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6088548U (ja) * | 1983-11-22 | 1985-06-18 | 三菱電機株式会社 | 半導体ウエ−ハの真空吸着具 |
-
1976
- 1976-04-16 JP JP4841176U patent/JPS52139767U/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6088548U (ja) * | 1983-11-22 | 1985-06-18 | 三菱電機株式会社 | 半導体ウエ−ハの真空吸着具 |