JPS632144B2 - - Google Patents
Info
- Publication number
- JPS632144B2 JPS632144B2 JP56160940A JP16094081A JPS632144B2 JP S632144 B2 JPS632144 B2 JP S632144B2 JP 56160940 A JP56160940 A JP 56160940A JP 16094081 A JP16094081 A JP 16094081A JP S632144 B2 JPS632144 B2 JP S632144B2
- Authority
- JP
- Japan
- Prior art keywords
- metal layer
- layer
- wiring
- main wiring
- metal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 229910052751 metal Inorganic materials 0.000 claims description 102
- 239000002184 metal Substances 0.000 claims description 102
- 230000004888 barrier function Effects 0.000 claims description 30
- 239000004065 semiconductor Substances 0.000 claims description 22
- 238000000034 method Methods 0.000 claims description 12
- 238000004519 manufacturing process Methods 0.000 claims description 10
- 238000005530 etching Methods 0.000 claims description 9
- 239000000758 substrate Substances 0.000 claims description 9
- 239000010410 layer Substances 0.000 description 81
- 229910004298 SiO 2 Inorganic materials 0.000 description 5
- 239000000956 alloy Substances 0.000 description 4
- 229910045601 alloy Inorganic materials 0.000 description 4
- 239000011229 interlayer Substances 0.000 description 4
- 239000002356 single layer Substances 0.000 description 4
- 238000007796 conventional method Methods 0.000 description 3
- 238000002844 melting Methods 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 238000000059 patterning Methods 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000002161 passivation Methods 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16094081A JPS5863150A (ja) | 1981-10-12 | 1981-10-12 | 半導体装置の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16094081A JPS5863150A (ja) | 1981-10-12 | 1981-10-12 | 半導体装置の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5863150A JPS5863150A (ja) | 1983-04-14 |
| JPS632144B2 true JPS632144B2 (nl) | 1988-01-18 |
Family
ID=15725509
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16094081A Granted JPS5863150A (ja) | 1981-10-12 | 1981-10-12 | 半導体装置の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5863150A (nl) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6144468A (ja) * | 1984-08-09 | 1986-03-04 | Matsushita Electric Ind Co Ltd | 半導体装置およびその製造方法 |
| JPH0195536A (ja) * | 1987-10-07 | 1989-04-13 | Mitsubishi Electric Corp | 多重膜配線体の製造方法 |
| JP3866783B2 (ja) | 1995-07-25 | 2007-01-10 | 株式会社 日立ディスプレイズ | 液晶表示装置 |
| DE69635239T2 (de) | 1995-11-21 | 2006-07-06 | Samsung Electronics Co., Ltd., Suwon | Verfahren zur Herstellung einer Flüssigkristall-Anzeige |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS526477A (en) * | 1975-07-07 | 1977-01-18 | Hitachi Ltd | Method for multi-layer film formation |
| JPS526597A (en) * | 1975-07-04 | 1977-01-19 | Hitachi Ltd | Column device for fluid chromatograph |
-
1981
- 1981-10-12 JP JP16094081A patent/JPS5863150A/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS526597A (en) * | 1975-07-04 | 1977-01-19 | Hitachi Ltd | Column device for fluid chromatograph |
| JPS526477A (en) * | 1975-07-07 | 1977-01-18 | Hitachi Ltd | Method for multi-layer film formation |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5863150A (ja) | 1983-04-14 |
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