JPS632144B2 - - Google Patents

Info

Publication number
JPS632144B2
JPS632144B2 JP56160940A JP16094081A JPS632144B2 JP S632144 B2 JPS632144 B2 JP S632144B2 JP 56160940 A JP56160940 A JP 56160940A JP 16094081 A JP16094081 A JP 16094081A JP S632144 B2 JPS632144 B2 JP S632144B2
Authority
JP
Japan
Prior art keywords
metal layer
layer
wiring
main wiring
metal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56160940A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5863150A (ja
Inventor
Yasushi Matsumi
Yoshio Umemura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oki Electric Industry Co Ltd
Original Assignee
Oki Electric Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oki Electric Industry Co Ltd filed Critical Oki Electric Industry Co Ltd
Priority to JP16094081A priority Critical patent/JPS5863150A/ja
Publication of JPS5863150A publication Critical patent/JPS5863150A/ja
Publication of JPS632144B2 publication Critical patent/JPS632144B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Drying Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP16094081A 1981-10-12 1981-10-12 半導体装置の製造方法 Granted JPS5863150A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16094081A JPS5863150A (ja) 1981-10-12 1981-10-12 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16094081A JPS5863150A (ja) 1981-10-12 1981-10-12 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS5863150A JPS5863150A (ja) 1983-04-14
JPS632144B2 true JPS632144B2 (en, 2012) 1988-01-18

Family

ID=15725509

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16094081A Granted JPS5863150A (ja) 1981-10-12 1981-10-12 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS5863150A (en, 2012)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6144468A (ja) * 1984-08-09 1986-03-04 Matsushita Electric Ind Co Ltd 半導体装置およびその製造方法
JPH0195536A (ja) * 1987-10-07 1989-04-13 Mitsubishi Electric Corp 多重膜配線体の製造方法
JP3866783B2 (ja) 1995-07-25 2007-01-10 株式会社 日立ディスプレイズ 液晶表示装置
DE69635239T2 (de) 1995-11-21 2006-07-06 Samsung Electronics Co., Ltd., Suwon Verfahren zur Herstellung einer Flüssigkristall-Anzeige

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS526597A (en) * 1975-07-04 1977-01-19 Hitachi Ltd Column device for fluid chromatograph
JPS526477A (en) * 1975-07-07 1977-01-18 Hitachi Ltd Method for multi-layer film formation

Also Published As

Publication number Publication date
JPS5863150A (ja) 1983-04-14

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