JPS63204623A - 半導体装置 - Google Patents
半導体装置Info
- Publication number
- JPS63204623A JPS63204623A JP3695587A JP3695587A JPS63204623A JP S63204623 A JPS63204623 A JP S63204623A JP 3695587 A JP3695587 A JP 3695587A JP 3695587 A JP3695587 A JP 3695587A JP S63204623 A JPS63204623 A JP S63204623A
- Authority
- JP
- Japan
- Prior art keywords
- property
- electrode terminal
- electrode terminals
- inspecting
- semiconductor device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title claims description 23
- 239000000758 substrate Substances 0.000 claims abstract description 14
- 238000000605 extraction Methods 0.000 claims description 4
- 238000007689 inspection Methods 0.000 abstract description 7
- 239000000523 sample Substances 0.000 abstract description 5
- 238000000034 method Methods 0.000 abstract 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Wire Bonding (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3695587A JPS63204623A (ja) | 1987-02-19 | 1987-02-19 | 半導体装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3695587A JPS63204623A (ja) | 1987-02-19 | 1987-02-19 | 半導体装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63204623A true JPS63204623A (ja) | 1988-08-24 |
| JPH0529140B2 JPH0529140B2 (enrdf_load_stackoverflow) | 1993-04-28 |
Family
ID=12484166
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3695587A Granted JPS63204623A (ja) | 1987-02-19 | 1987-02-19 | 半導体装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63204623A (enrdf_load_stackoverflow) |
-
1987
- 1987-02-19 JP JP3695587A patent/JPS63204623A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0529140B2 (enrdf_load_stackoverflow) | 1993-04-28 |
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