JPS6315992B2 - - Google Patents

Info

Publication number
JPS6315992B2
JPS6315992B2 JP16053282A JP16053282A JPS6315992B2 JP S6315992 B2 JPS6315992 B2 JP S6315992B2 JP 16053282 A JP16053282 A JP 16053282A JP 16053282 A JP16053282 A JP 16053282A JP S6315992 B2 JPS6315992 B2 JP S6315992B2
Authority
JP
Japan
Prior art keywords
etching
mask
metal material
etched
tip
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP16053282A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5950181A (ja
Inventor
Hiromichi Yoshida
Takashi Suzumura
Shigeo Hagitani
Mamoru Onda
Koichi Kayane
Seiji Wakune
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Cable Ltd
Original Assignee
Hitachi Cable Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Cable Ltd filed Critical Hitachi Cable Ltd
Priority to JP16053282A priority Critical patent/JPS5950181A/ja
Publication of JPS5950181A publication Critical patent/JPS5950181A/ja
Publication of JPS6315992B2 publication Critical patent/JPS6315992B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Weting (AREA)
JP16053282A 1982-09-14 1982-09-14 部分エッチング法とそれに使用される機械的マスク Granted JPS5950181A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16053282A JPS5950181A (ja) 1982-09-14 1982-09-14 部分エッチング法とそれに使用される機械的マスク

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16053282A JPS5950181A (ja) 1982-09-14 1982-09-14 部分エッチング法とそれに使用される機械的マスク

Publications (2)

Publication Number Publication Date
JPS5950181A JPS5950181A (ja) 1984-03-23
JPS6315992B2 true JPS6315992B2 (enrdf_load_stackoverflow) 1988-04-07

Family

ID=15717000

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16053282A Granted JPS5950181A (ja) 1982-09-14 1982-09-14 部分エッチング法とそれに使用される機械的マスク

Country Status (1)

Country Link
JP (1) JPS5950181A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS5950181A (ja) 1984-03-23

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