JPS63142826A - プロ−ブカ−ド - Google Patents

プロ−ブカ−ド

Info

Publication number
JPS63142826A
JPS63142826A JP61291157A JP29115786A JPS63142826A JP S63142826 A JPS63142826 A JP S63142826A JP 61291157 A JP61291157 A JP 61291157A JP 29115786 A JP29115786 A JP 29115786A JP S63142826 A JPS63142826 A JP S63142826A
Authority
JP
Japan
Prior art keywords
probe
stylus
wafer
chips
probe needle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP61291157A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0582972B2 (enExample
Inventor
Noboru Masuoka
増岡　昇
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Priority to JP61291157A priority Critical patent/JPS63142826A/ja
Publication of JPS63142826A publication Critical patent/JPS63142826A/ja
Publication of JPH0582972B2 publication Critical patent/JPH0582972B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07342—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being at an angle other than perpendicular to test object, e.g. probe card

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP61291157A 1986-12-05 1986-12-05 プロ−ブカ−ド Granted JPS63142826A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61291157A JPS63142826A (ja) 1986-12-05 1986-12-05 プロ−ブカ−ド

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61291157A JPS63142826A (ja) 1986-12-05 1986-12-05 プロ−ブカ−ド

Publications (2)

Publication Number Publication Date
JPS63142826A true JPS63142826A (ja) 1988-06-15
JPH0582972B2 JPH0582972B2 (enExample) 1993-11-24

Family

ID=17765182

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61291157A Granted JPS63142826A (ja) 1986-12-05 1986-12-05 プロ−ブカ−ド

Country Status (1)

Country Link
JP (1) JPS63142826A (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5631573A (en) * 1994-09-20 1997-05-20 Mitsubishi Denki Kabushiki Kaisha Probe-type test handler
EP0908944A1 (fr) * 1997-10-09 1999-04-14 Commissariat A L'energie Atomique Caractérisation électrique d'une couche isolante recouvrant un substrat conducteur ou semiconducteur
JP2005297185A (ja) * 2004-04-15 2005-10-27 Fei Co 微小構造を修正するためのスタイラス・システム

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5040550U (enExample) * 1973-08-04 1975-04-24
JPS5569058A (en) * 1978-11-20 1980-05-24 Fujitsu Ltd Contact method for probe
JPS57115841A (en) * 1981-01-10 1982-07-19 Nec Corp Probing method
JPS58169068A (ja) * 1982-03-31 1983-10-05 Toshiba Corp 半導体装置の特性測定方法
JPS58148935U (ja) * 1982-03-31 1983-10-06 日本電子材料株式会社 プロ−ブカ−ド

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5040550U (enExample) * 1973-08-04 1975-04-24
JPS5569058A (en) * 1978-11-20 1980-05-24 Fujitsu Ltd Contact method for probe
JPS57115841A (en) * 1981-01-10 1982-07-19 Nec Corp Probing method
JPS58169068A (ja) * 1982-03-31 1983-10-05 Toshiba Corp 半導体装置の特性測定方法
JPS58148935U (ja) * 1982-03-31 1983-10-06 日本電子材料株式会社 プロ−ブカ−ド

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5631573A (en) * 1994-09-20 1997-05-20 Mitsubishi Denki Kabushiki Kaisha Probe-type test handler
EP0908944A1 (fr) * 1997-10-09 1999-04-14 Commissariat A L'energie Atomique Caractérisation électrique d'une couche isolante recouvrant un substrat conducteur ou semiconducteur
FR2769753A1 (fr) * 1997-10-09 1999-04-16 Commissariat Energie Atomique Caracterisation electrique d'une couche isolante recouvrant un substrat conducteur ou semiconducteur
US6074886A (en) * 1997-10-09 2000-06-13 Commissariat A L'energie Atomique Electrical characterization of an insulating layer covering a conducting or semiconducting substrate
JP2005297185A (ja) * 2004-04-15 2005-10-27 Fei Co 微小構造を修正するためのスタイラス・システム

Also Published As

Publication number Publication date
JPH0582972B2 (enExample) 1993-11-24

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