JPS57115841A - Probing method - Google Patents

Probing method

Info

Publication number
JPS57115841A
JPS57115841A JP196381A JP196381A JPS57115841A JP S57115841 A JPS57115841 A JP S57115841A JP 196381 A JP196381 A JP 196381A JP 196381 A JP196381 A JP 196381A JP S57115841 A JPS57115841 A JP S57115841A
Authority
JP
Japan
Prior art keywords
electrodes
board
pins
guide
circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP196381A
Other languages
Japanese (ja)
Inventor
Hideto Nitta
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP196381A priority Critical patent/JPS57115841A/en
Publication of JPS57115841A publication Critical patent/JPS57115841A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

PURPOSE:To facilitate the positioning of probe pins relative to electrodes by a method wherein a board provided with guide holes through which probe pins are inserted to abut against corresponding electrodes when determining characteristics of a hybrid IC circuit and the like is located over said circuit. CONSTITUTION:This relates to a method of holding the tips of probe pins 2 provided in a block 3 made of a colorless transparent acrylic board 1 facing the electrodes 8 provided in a large number on the surface of a circuit substrate 9 made of a ceramic board 7. That is, a guide board 6 made of an acrylic board 4 made of the same material constituting the acrylic board 1 and provided with a number of guide holes 5 corresponding respectively to the electrodes 8 is positioned between the block 3 and the substrate 9. The electrodes 8 are positioned so that they may be exposed in the guide holes 5 through which the tips of the pins 2 gain access to and abut against the opposite electrodes 8. The empolyment of the guide board 6 facilitates the proper positioning of the pins 2 to contact the electrodes 8.
JP196381A 1981-01-10 1981-01-10 Probing method Pending JPS57115841A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP196381A JPS57115841A (en) 1981-01-10 1981-01-10 Probing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP196381A JPS57115841A (en) 1981-01-10 1981-01-10 Probing method

Publications (1)

Publication Number Publication Date
JPS57115841A true JPS57115841A (en) 1982-07-19

Family

ID=11516235

Family Applications (1)

Application Number Title Priority Date Filing Date
JP196381A Pending JPS57115841A (en) 1981-01-10 1981-01-10 Probing method

Country Status (1)

Country Link
JP (1) JPS57115841A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61154137A (en) * 1984-12-27 1986-07-12 Seiichiro Sogo Test probe assembly
JPS63142826A (en) * 1986-12-05 1988-06-15 Tokyo Electron Ltd Probe card
JPS6439742A (en) * 1987-08-06 1989-02-10 Tokyo Electron Ltd Probe card
JP2016129261A (en) * 1999-04-19 2016-07-14 アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ Method and apparatus for aligning cassette

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61154137A (en) * 1984-12-27 1986-07-12 Seiichiro Sogo Test probe assembly
JPH0515067B2 (en) * 1984-12-27 1993-02-26 Kurotani Nobuko
JPS63142826A (en) * 1986-12-05 1988-06-15 Tokyo Electron Ltd Probe card
JPH0582972B2 (en) * 1986-12-05 1993-11-24 Tokyo Electron Ltd
JPS6439742A (en) * 1987-08-06 1989-02-10 Tokyo Electron Ltd Probe card
JP2016129261A (en) * 1999-04-19 2016-07-14 アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ Method and apparatus for aligning cassette

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