GB2094479B - Determining probe contact in testing integrated circuits - Google Patents
Determining probe contact in testing integrated circuitsInfo
- Publication number
- GB2094479B GB2094479B GB8127051A GB8127051A GB2094479B GB 2094479 B GB2094479 B GB 2094479B GB 8127051 A GB8127051 A GB 8127051A GB 8127051 A GB8127051 A GB 8127051A GB 2094479 B GB2094479 B GB 2094479B
- Authority
- GB
- United Kingdom
- Prior art keywords
- integrated circuits
- probe contact
- testing integrated
- determining probe
- determining
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000523 sample Substances 0.000 title 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/16—Measuring force or stress, in general using properties of piezoelectric devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/06794—Devices for sensing when probes are in contact, or in position to contact, with measured object
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
- G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
- G01R1/07342—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being at an angle other than perpendicular to test object, e.g. probe card
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Engineering & Computer Science (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Measuring Leads Or Probes (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US87356478A | 1978-01-30 | 1978-01-30 | |
US05/893,118 US4195259A (en) | 1978-04-04 | 1978-04-04 | Multiprobe test system and method of using same |
Publications (2)
Publication Number | Publication Date |
---|---|
GB2094479A GB2094479A (en) | 1982-09-15 |
GB2094479B true GB2094479B (en) | 1983-03-16 |
Family
ID=27128303
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB7903073A Expired GB2014315B (en) | 1978-01-30 | 1979-01-29 | Determining probe contact |
GB8127051A Expired GB2094479B (en) | 1978-01-30 | 1979-01-29 | Determining probe contact in testing integrated circuits |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB7903073A Expired GB2014315B (en) | 1978-01-30 | 1979-01-29 | Determining probe contact |
Country Status (5)
Country | Link |
---|---|
JP (1) | JPS54145482A (en) |
DE (1) | DE2903517A1 (en) |
FR (1) | FR2425148B1 (en) |
GB (2) | GB2014315B (en) |
IT (1) | IT1113297B (en) |
Families Citing this family (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3068052D1 (en) * | 1979-11-05 | 1984-07-05 | Texas Instruments Inc | Probe assembly for testing integrated circuits |
JPS58164236U (en) * | 1982-04-27 | 1983-11-01 | 日本電気ホームエレクトロニクス株式会社 | Semiconductor wafer characteristic measurement equipment |
IL79820A0 (en) * | 1985-09-26 | 1986-11-30 | Tektronix Inc | Wafer probe head,and method of assembling same |
US4758785A (en) * | 1986-09-03 | 1988-07-19 | Tektronix, Inc. | Pressure control apparatus for use in an integrated circuit testing station |
US4673839A (en) * | 1986-09-08 | 1987-06-16 | Tektronix, Inc. | Piezoelectric pressure sensing apparatus for integrated circuit testing stations |
US5012186A (en) * | 1990-06-08 | 1991-04-30 | Cascade Microtech, Inc. | Electrical probe with contact force protection |
EP0547251A1 (en) * | 1991-12-14 | 1993-06-23 | International Business Machines Corporation | A method for testing a micro circuit |
DE19952943C2 (en) * | 1999-11-03 | 2003-07-03 | Infineon Technologies Ag | Needle card adjustment device for the planarization of needle sets of a needle card |
DE20114544U1 (en) | 2000-12-04 | 2002-02-21 | Cascade Microtech Inc | wafer probe |
WO2004083873A2 (en) * | 2003-03-14 | 2004-09-30 | Applied Precision, Llc | Adjusting device for the planarization of probe sets of a probe card |
US7057404B2 (en) | 2003-05-23 | 2006-06-06 | Sharp Laboratories Of America, Inc. | Shielded probe for testing a device under test |
GB2425844B (en) | 2003-12-24 | 2007-07-11 | Cascade Microtech Inc | Active wafer probe |
WO2006031646A2 (en) | 2004-09-13 | 2006-03-23 | Cascade Microtech, Inc. | Double sided probing structures |
US7535247B2 (en) | 2005-01-31 | 2009-05-19 | Cascade Microtech, Inc. | Interface for testing semiconductors |
US7656172B2 (en) | 2005-01-31 | 2010-02-02 | Cascade Microtech, Inc. | System for testing semiconductors |
US7764072B2 (en) | 2006-06-12 | 2010-07-27 | Cascade Microtech, Inc. | Differential signal probing system |
US7723999B2 (en) | 2006-06-12 | 2010-05-25 | Cascade Microtech, Inc. | Calibration structures for differential signal probing |
US7403028B2 (en) | 2006-06-12 | 2008-07-22 | Cascade Microtech, Inc. | Test structure and probe for differential signals |
US7876114B2 (en) | 2007-08-08 | 2011-01-25 | Cascade Microtech, Inc. | Differential waveguide probe |
CN107015137B (en) * | 2017-05-26 | 2023-12-08 | 深圳市赛伦北斗科技有限责任公司 | Circuit board detection device, system and method |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1063381A (en) * | 1963-01-18 | 1967-03-30 | Wilmot Breeden Ltd | Improvements in or relating to surface testing apparatus |
US3446065A (en) * | 1965-08-11 | 1969-05-27 | Transistor Automation Corp | Automatic probing apparatus |
US3810017A (en) * | 1972-05-15 | 1974-05-07 | Teledyne Inc | Precision probe for testing micro-electronic units |
US3849728A (en) * | 1973-08-21 | 1974-11-19 | Wentworth Labor Inc | Fixed point probe card and an assembly and repair fixture therefor |
JPS5178692A (en) * | 1974-12-29 | 1976-07-08 | Sony Corp |
-
1979
- 1979-01-29 IT IT47813/79A patent/IT1113297B/en active
- 1979-01-29 GB GB7903073A patent/GB2014315B/en not_active Expired
- 1979-01-29 GB GB8127051A patent/GB2094479B/en not_active Expired
- 1979-01-30 FR FR7902318A patent/FR2425148B1/fr not_active Expired
- 1979-01-30 DE DE19792903517 patent/DE2903517A1/en not_active Withdrawn
- 1979-01-30 JP JP961479A patent/JPS54145482A/en active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS54145482A (en) | 1979-11-13 |
GB2014315A (en) | 1979-08-22 |
IT7947813A0 (en) | 1979-01-29 |
FR2425148B1 (en) | 1985-06-28 |
DE2903517A1 (en) | 1979-08-02 |
GB2014315B (en) | 1983-02-02 |
IT1113297B (en) | 1986-01-20 |
GB2094479A (en) | 1982-09-15 |
JPH039425B2 (en) | 1991-02-08 |
FR2425148A1 (en) | 1979-11-30 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PE20 | Patent expired after termination of 20 years |
Effective date: 19990128 |