JPS56135938A - Fixed probe board - Google Patents

Fixed probe board

Info

Publication number
JPS56135938A
JPS56135938A JP3988580A JP3988580A JPS56135938A JP S56135938 A JPS56135938 A JP S56135938A JP 3988580 A JP3988580 A JP 3988580A JP 3988580 A JP3988580 A JP 3988580A JP S56135938 A JPS56135938 A JP S56135938A
Authority
JP
Japan
Prior art keywords
probe needles
electrodes
tips
measuring electrodes
constitution
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3988580A
Other languages
Japanese (ja)
Other versions
JPS5833700B2 (en
Inventor
Yoshie Hasegawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to JP55039885A priority Critical patent/JPS5833700B2/en
Publication of JPS56135938A publication Critical patent/JPS56135938A/en
Publication of JPS5833700B2 publication Critical patent/JPS5833700B2/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

PURPOSE:To improve the precision of measurement by arranging probe needles from the fixed parts to the tip parts thereof on the same plane, bending the tip parts vertically at prescribed positions corresponding to measuring electrodes and positioning the tips thereof facing to the measuring electrodes. CONSTITUTION:A number of probe needles 2 are arranged in the part of a square opening 9 provided in the central part of a print substrate 1 in such a manner that the points 3 thereof are matched respectively in position with the electrodes of semiconductor chips which are objects to be measured and that they form a plane parallel to the surface of the print substrate 1. Moreover, the arrangement of the probe needles 2 is made so that the length thereof from the fixed parts 4 to the tips is all the same. The tips of the probe needles 2 are bent vertically in the positions corresponding to the measuring electrodes and the points 3 thereof are opposed to the surfaces of the electrodes. Since the needle pressure applied on the surface of the electrode turns equal with respect to all of the probe needles by this constitution, unevenness in measurement can be prevented.
JP55039885A 1980-03-28 1980-03-28 Fixed probe board Expired JPS5833700B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55039885A JPS5833700B2 (en) 1980-03-28 1980-03-28 Fixed probe board

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55039885A JPS5833700B2 (en) 1980-03-28 1980-03-28 Fixed probe board

Publications (2)

Publication Number Publication Date
JPS56135938A true JPS56135938A (en) 1981-10-23
JPS5833700B2 JPS5833700B2 (en) 1983-07-21

Family

ID=12565422

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55039885A Expired JPS5833700B2 (en) 1980-03-28 1980-03-28 Fixed probe board

Country Status (1)

Country Link
JP (1) JPS5833700B2 (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58142938U (en) * 1982-03-18 1983-09-27 富士通株式会社 probe card
JPS58190061A (en) * 1982-04-28 1983-11-05 Toshiba Corp Amorphous silicon semiconductor device and manufacture thereof
JPS5972148A (en) * 1982-09-14 1984-04-24 アキユテスト・コ−ポレ−シヨン Electronic circuit wafer insepecting device
JPS6082866A (en) * 1983-10-13 1985-05-11 Hiyuuguru Electron Kk Fixed probe card
WO1986001133A1 (en) * 1984-08-17 1986-02-27 Motorola, Inc. Pass-through test socket for semiconductor devices
JP2004047336A (en) * 2002-07-12 2004-02-12 Advantest Corp Contact sheet, and socket for semiconductor device equipped with the sheet
JP2015025813A (en) * 2012-07-13 2015-02-05 旺▲夕▼科技股▲分▼有限公司 Probe fixing structure and optical measuring device thereof

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6050252U (en) * 1983-09-09 1985-04-09 株式会社　土井製作所 underground hole ladder
JPS60162156U (en) * 1984-04-04 1985-10-28 株式会社　土井製作所 underground hole ladder
JPH0489133U (en) * 1990-11-30 1992-08-04

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5486962U (en) * 1977-11-29 1979-06-20

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5486962U (en) * 1977-11-29 1979-06-20

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58142938U (en) * 1982-03-18 1983-09-27 富士通株式会社 probe card
JPS6210998Y2 (en) * 1982-03-18 1987-03-16
JPS58190061A (en) * 1982-04-28 1983-11-05 Toshiba Corp Amorphous silicon semiconductor device and manufacture thereof
JPH0546106B2 (en) * 1982-04-28 1993-07-13 Tokyo Shibaura Electric Co
JPS5972148A (en) * 1982-09-14 1984-04-24 アキユテスト・コ−ポレ−シヨン Electronic circuit wafer insepecting device
JPS6082866A (en) * 1983-10-13 1985-05-11 Hiyuuguru Electron Kk Fixed probe card
WO1986001133A1 (en) * 1984-08-17 1986-02-27 Motorola, Inc. Pass-through test socket for semiconductor devices
JP2004047336A (en) * 2002-07-12 2004-02-12 Advantest Corp Contact sheet, and socket for semiconductor device equipped with the sheet
JP2015025813A (en) * 2012-07-13 2015-02-05 旺▲夕▼科技股▲分▼有限公司 Probe fixing structure and optical measuring device thereof

Also Published As

Publication number Publication date
JPS5833700B2 (en) 1983-07-21

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