JPS56130968A - Semiconductor device - Google Patents

Semiconductor device

Info

Publication number
JPS56130968A
JPS56130968A JP3381180A JP3381180A JPS56130968A JP S56130968 A JPS56130968 A JP S56130968A JP 3381180 A JP3381180 A JP 3381180A JP 3381180 A JP3381180 A JP 3381180A JP S56130968 A JPS56130968 A JP S56130968A
Authority
JP
Japan
Prior art keywords
pattern
region
resistance
squeezing
conductivity type
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3381180A
Other languages
Japanese (ja)
Inventor
Yuichi Hirofuji
Tadanaka Yoneda
Haruyasu Yamada
Tsutomu Fujita
Hiroyuki Sakai
Toyoki Takemoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP3381180A priority Critical patent/JPS56130968A/en
Publication of JPS56130968A publication Critical patent/JPS56130968A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/544—Marks applied to semiconductor devices or parts, e.g. registration marks, alignment structures, wafer maps
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Landscapes

  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Bipolar Transistors (AREA)
  • Semiconductor Integrated Circuits (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

PURPOSE:To measure accurately a squeezing resistance in a semiconductor device by forming a high impurity density region on the surface of the region between which the squeezing resistor is interposed to form a pattern for leading an electrode and forming a plurality of squeezing resistance patterns in parallel with each other. CONSTITUTION:The other conductivity type resistance region 33 is formed on one conductivity type substrate 31, and one conductivity type surface region 35 is formed on the surface thereof. A pattern C for retaining the potential of the substrate 31 at a predetermined potential and two test patterns A, B having different shapes of the resistance region under the surface region 35 are formed. The pattern A is a pattern for measuring the squeezing resistance with a ratio of the width to the length as 1:1, and the pattern B is a pattern of measuring the squeezing resistance with a ration of the width to the length as 2:1.
JP3381180A 1980-03-17 1980-03-17 Semiconductor device Pending JPS56130968A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3381180A JPS56130968A (en) 1980-03-17 1980-03-17 Semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3381180A JPS56130968A (en) 1980-03-17 1980-03-17 Semiconductor device

Publications (1)

Publication Number Publication Date
JPS56130968A true JPS56130968A (en) 1981-10-14

Family

ID=12396855

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3381180A Pending JPS56130968A (en) 1980-03-17 1980-03-17 Semiconductor device

Country Status (1)

Country Link
JP (1) JPS56130968A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101000600B1 (en) * 2003-04-30 2010-12-10 크로스텍 캐피탈, 엘엘씨 Test pattern for monitoring sheet resistivity of implantation process and cmos image sensor with built in the same

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101000600B1 (en) * 2003-04-30 2010-12-10 크로스텍 캐피탈, 엘엘씨 Test pattern for monitoring sheet resistivity of implantation process and cmos image sensor with built in the same

Similar Documents

Publication Publication Date Title
JPS56130968A (en) Semiconductor device
JPS56135938A (en) Fixed probe board
JPS5775438A (en) Semiconductor element
JPS5337077A (en) Probe for tester
JPS57202774A (en) Semiconductor device
JPS5440082A (en) Semiconductor test device
JPS5521181A (en) Method of measuring positional deviation
JPS5322477A (en) Measuring jig
JPS5673458A (en) Semiconductor device
JPS5629341A (en) Measurement of properties of semiconductor device
JPS56138936A (en) Semiconductor evaluation element
JPS53120370A (en) Measuring method of diffusion distance of minority carriers and its apparatus
JPS5692465A (en) Contact resistance measuring method of electrode
JPS5376875A (en) Multipoint temperature difference measuring apparatus
JPS5214464A (en) Surface resistance measuring device
JPS52115188A (en) Prober
JPS5365670A (en) Measurement device for semiconductor probe
MATZEN Apparatus for measuring semiconductor device resistance[Patent]
JPS5455462A (en) Masking accuracy measurement
JPS57100741A (en) Semiconductor element for reliability evaluation
JPS5438772A (en) Semiconductor element for testing
JPS6489427A (en) Connecting accuracy measuring method in lithography apparatus
JPS5382450A (en) Method and apparatus of measuring dimensions
JPS5349479A (en) Resistance measuring device
JPS5416183A (en) Probe card