JPS5629341A - Measurement of properties of semiconductor device - Google Patents

Measurement of properties of semiconductor device

Info

Publication number
JPS5629341A
JPS5629341A JP10400579A JP10400579A JPS5629341A JP S5629341 A JPS5629341 A JP S5629341A JP 10400579 A JP10400579 A JP 10400579A JP 10400579 A JP10400579 A JP 10400579A JP S5629341 A JPS5629341 A JP S5629341A
Authority
JP
Japan
Prior art keywords
properties
pellet
collector electrode
measurement
semiconductor device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10400579A
Other languages
Japanese (ja)
Inventor
Shigeru Takeuchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP10400579A priority Critical patent/JPS5629341A/en
Publication of JPS5629341A publication Critical patent/JPS5629341A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

PURPOSE:To facilitate an AC properties of a semiconductor pellet by providing a measuring collector electrode in addition to base and emitter electrodes on a main surface of a semiconductor element formed on the wafer. CONSTITUTION:A measuring collector electrode C' is formed in addition to base and emitter electrodes B and E on the upper surface of a wafer, and three styluses are simultaneously contacted from one direction therewith for measurements. The electrode C' may be provided in the boundary of the semiconductor element, and after separated to the pellet, it may be used as the collector electrode at the substrate side. This configuration can measure easily the AC properties of the pellet.
JP10400579A 1979-08-17 1979-08-17 Measurement of properties of semiconductor device Pending JPS5629341A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10400579A JPS5629341A (en) 1979-08-17 1979-08-17 Measurement of properties of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10400579A JPS5629341A (en) 1979-08-17 1979-08-17 Measurement of properties of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5629341A true JPS5629341A (en) 1981-03-24

Family

ID=14369146

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10400579A Pending JPS5629341A (en) 1979-08-17 1979-08-17 Measurement of properties of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5629341A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57152140A (en) * 1981-03-14 1982-09-20 Nec Home Electronics Ltd Measurement of characteristic of semiconductor device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57152140A (en) * 1981-03-14 1982-09-20 Nec Home Electronics Ltd Measurement of characteristic of semiconductor device

Similar Documents

Publication Publication Date Title
GB2014743B (en) Four-quadrant multiprobe-edge sensor for semiconductor wafer probing
JPS5629341A (en) Measurement of properties of semiconductor device
JPS5337077A (en) Probe for tester
JPS5369069A (en) Warpage measuring device of base plates
JPS5278387A (en) Production of semiconductor device
JPS5224078A (en) Ic use measuring device
JPS5571034A (en) Measuring method for resistance distribution of compound semiconductor single crystal
JPS5483774A (en) Manufacture of semiconductor device
JPS5322477A (en) Measuring jig
JPS5571025A (en) Providing fine gap
JPS5353254A (en) Semiconductor device
JPS5455462A (en) Masking accuracy measurement
JPS6486536A (en) Semiconductor device
JPS52115188A (en) Prober
JPS57159014A (en) Measuring method for characteristics of epitaxial semiconductor wafer
JPS5516453A (en) Tape for holding semiconductor device
JPS54114184A (en) Measuring device for semiconductor device
JPS57199926A (en) Measuring method for temperature
JPS5776852A (en) Card for probe
JPS5386585A (en) Production of charge trasnfer device
JPS5350983A (en) Characteristic propertie mesuring method and apparatus of semiconductor element
JPS551530A (en) Moisture detecting method in package cavity
JPS56101567A (en) Measuring method of semiconductor element
JPS56130968A (en) Semiconductor device
JPS5322476A (en) Measuring jig