JPS54114184A - Measuring device for semiconductor device - Google Patents

Measuring device for semiconductor device

Info

Publication number
JPS54114184A
JPS54114184A JP2263278A JP2263278A JPS54114184A JP S54114184 A JPS54114184 A JP S54114184A JP 2263278 A JP2263278 A JP 2263278A JP 2263278 A JP2263278 A JP 2263278A JP S54114184 A JPS54114184 A JP S54114184A
Authority
JP
Japan
Prior art keywords
measurement
terminal
semiconductor chip
touch
prober
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2263278A
Other languages
Japanese (ja)
Inventor
Yukio Aoki
Tetsuji Morioka
Eizo Mori
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP2263278A priority Critical patent/JPS54114184A/en
Publication of JPS54114184A publication Critical patent/JPS54114184A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To obtain the accurate readings with elimination of the effect of the inductance and without using any prober by preparing the peripheral circuit for measurement and the insulator substrate containing the terminal to touch the semiconductor chip separately and then carrying out the measurement through contact of each terminal to the chip electrode.
CONSTITUTION: Electric part 5 which is a peripheral circuit is attached to insulator sibstrate 4, and terminal 7 to touch semiconductor chip 1 is provided on the back of the substrate via conductor layer 6. Plural units of such measurement circuit are prepared, and each terminal 7 is made touch electrode 3 of semiconductor chip 1 provided on base board 2 and then pressed with pressure lod 8 to carry out measurement. In this way, the ordinary prober containing a long needle can be omitted, so eliminating the effect caused by the needle inductance. As a result, no error is cuased even in the case of measurement with use of the high frequency.
COPYRIGHT: (C)1979,JPO&Japio
JP2263278A 1978-02-27 1978-02-27 Measuring device for semiconductor device Pending JPS54114184A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2263278A JPS54114184A (en) 1978-02-27 1978-02-27 Measuring device for semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2263278A JPS54114184A (en) 1978-02-27 1978-02-27 Measuring device for semiconductor device

Publications (1)

Publication Number Publication Date
JPS54114184A true JPS54114184A (en) 1979-09-06

Family

ID=12088196

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2263278A Pending JPS54114184A (en) 1978-02-27 1978-02-27 Measuring device for semiconductor device

Country Status (1)

Country Link
JP (1) JPS54114184A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61228636A (en) * 1985-04-01 1986-10-11 Yamagata Nippon Denki Kk Transporting container for semiconductor device
JPS63245931A (en) * 1986-12-15 1988-10-13 ティアールダブリュー　インコーポレーテッド Probe card for testing integrated circuit chip

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61228636A (en) * 1985-04-01 1986-10-11 Yamagata Nippon Denki Kk Transporting container for semiconductor device
JPH0342499B2 (en) * 1985-04-01 1991-06-27
JPS63245931A (en) * 1986-12-15 1988-10-13 ティアールダブリュー　インコーポレーテッド Probe card for testing integrated circuit chip

Similar Documents

Publication Publication Date Title
JPS53123074A (en) Semiconductor device
JPS54114184A (en) Measuring device for semiconductor device
JPS5231758A (en) Liquid display device
JPS5437582A (en) Measuring method for capacity of three-terminal semiconductor element
JPS5440082A (en) Semiconductor test device
JPS5487070A (en) Simultaneous multi-contact probe
JPS5793543A (en) Measuring system for semiconductor element
JPS6464285A (en) Printed board
JPS547279A (en) Socket adapter for ic measurement
JPS5483774A (en) Manufacture of semiconductor device
JPS5265666A (en) Semiconductor device
JPS52128071A (en) Automatic test unit
JPS5280798A (en) Electrical connection equipment for display substance
JPS52113768A (en) Mask matching shift measuring pattern
JPS5244673A (en) Loss angle measuring instrument
JPS5441443A (en) Integrated circuit device
JPS53138377A (en) Insulation testing method
JPS5481077A (en) Semiconductor wafer
JPS56138934A (en) Testing device
JPS5486269A (en) Semiconductor device
JPS53110092A (en) Socket
JPS5715435A (en) Substrate for semiconductor device
JPS5313967A (en) Measuring method for characteristic of vibration gauge
GB1494653A (en) Charge coupled devices
JPS52107782A (en) Super-high frequency ic unit