JPS551530A - Moisture detecting method in package cavity - Google Patents

Moisture detecting method in package cavity

Info

Publication number
JPS551530A
JPS551530A JP7419578A JP7419578A JPS551530A JP S551530 A JPS551530 A JP S551530A JP 7419578 A JP7419578 A JP 7419578A JP 7419578 A JP7419578 A JP 7419578A JP S551530 A JPS551530 A JP S551530A
Authority
JP
Japan
Prior art keywords
moisture
leads
bonded
base
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7419578A
Other languages
Japanese (ja)
Inventor
Hiroshi Tsuneno
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP7419578A priority Critical patent/JPS551530A/en
Publication of JPS551530A publication Critical patent/JPS551530A/en
Pending legal-status Critical Current

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  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)

Abstract

PURPOSE: To detect the moisture in the cavity of a semiconductor package with ease and high sensitivity by making use of the fact that B2O3 has hydroscopicity and that it exhibits conductivity when absorbs moisture.
CONSTITUTION: Electrode layers 22, 23 are parallel provided by way of a strip-form minute clearance on an Al2O3 chip 21. In said minute clearance part is baked B2O3, by which a B2O3 layer 24 is formed. Al wires 11, 12 are bonded respectively to the layers 22, 23. This moisture detecting unit 20 is provided on a base 3 in the capavity 5 of the pickage 2 composed of the ceramic base 3 and ceramic cap 4. The wires 11, 12 are bonded to leads 6, 7 respectively, and the base 3 and cap 4 are sealed and bonded by way of a glass sealing layer 8 while allowing the penetration of the leads 6, 7 therethrough. Since the moisture in the cavity 5 is absorbed in the layer 24, its conductivity change is electrically measured by the use of the leads 6, 7, whereby the moisture is readily detected.
COPYRIGHT: (C)1980,JPO&Japio
JP7419578A 1978-06-21 1978-06-21 Moisture detecting method in package cavity Pending JPS551530A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7419578A JPS551530A (en) 1978-06-21 1978-06-21 Moisture detecting method in package cavity

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7419578A JPS551530A (en) 1978-06-21 1978-06-21 Moisture detecting method in package cavity

Publications (1)

Publication Number Publication Date
JPS551530A true JPS551530A (en) 1980-01-08

Family

ID=13540147

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7419578A Pending JPS551530A (en) 1978-06-21 1978-06-21 Moisture detecting method in package cavity

Country Status (1)

Country Link
JP (1) JPS551530A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4402904A (en) * 1980-12-18 1983-09-06 Combustion Engineering, Inc. Method for determining clad integrity of a nuclear fuel rod
JPS59151021A (en) * 1982-12-15 1984-08-29 ウエストフエ−リツシエ・メタル・インドウストリ−・コムマンデイト・ゲゼルシヤフト・ヒユツク・ウント・コムパニ− Device for measuring and monitoring state of filling of liquid vessel

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4402904A (en) * 1980-12-18 1983-09-06 Combustion Engineering, Inc. Method for determining clad integrity of a nuclear fuel rod
JPS59151021A (en) * 1982-12-15 1984-08-29 ウエストフエ−リツシエ・メタル・インドウストリ−・コムマンデイト・ゲゼルシヤフト・ヒユツク・ウント・コムパニ− Device for measuring and monitoring state of filling of liquid vessel

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