JPS551530A - Moisture detecting method in package cavity - Google Patents
Moisture detecting method in package cavityInfo
- Publication number
- JPS551530A JPS551530A JP7419578A JP7419578A JPS551530A JP S551530 A JPS551530 A JP S551530A JP 7419578 A JP7419578 A JP 7419578A JP 7419578 A JP7419578 A JP 7419578A JP S551530 A JPS551530 A JP S551530A
- Authority
- JP
- Japan
- Prior art keywords
- moisture
- leads
- bonded
- base
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Abstract
PURPOSE: To detect the moisture in the cavity of a semiconductor package with ease and high sensitivity by making use of the fact that B2O3 has hydroscopicity and that it exhibits conductivity when absorbs moisture.
CONSTITUTION: Electrode layers 22, 23 are parallel provided by way of a strip-form minute clearance on an Al2O3 chip 21. In said minute clearance part is baked B2O3, by which a B2O3 layer 24 is formed. Al wires 11, 12 are bonded respectively to the layers 22, 23. This moisture detecting unit 20 is provided on a base 3 in the capavity 5 of the pickage 2 composed of the ceramic base 3 and ceramic cap 4. The wires 11, 12 are bonded to leads 6, 7 respectively, and the base 3 and cap 4 are sealed and bonded by way of a glass sealing layer 8 while allowing the penetration of the leads 6, 7 therethrough. Since the moisture in the cavity 5 is absorbed in the layer 24, its conductivity change is electrically measured by the use of the leads 6, 7, whereby the moisture is readily detected.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7419578A JPS551530A (en) | 1978-06-21 | 1978-06-21 | Moisture detecting method in package cavity |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7419578A JPS551530A (en) | 1978-06-21 | 1978-06-21 | Moisture detecting method in package cavity |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS551530A true JPS551530A (en) | 1980-01-08 |
Family
ID=13540147
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7419578A Pending JPS551530A (en) | 1978-06-21 | 1978-06-21 | Moisture detecting method in package cavity |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS551530A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4402904A (en) * | 1980-12-18 | 1983-09-06 | Combustion Engineering, Inc. | Method for determining clad integrity of a nuclear fuel rod |
JPS59151021A (en) * | 1982-12-15 | 1984-08-29 | ウエストフエ−リツシエ・メタル・インドウストリ−・コムマンデイト・ゲゼルシヤフト・ヒユツク・ウント・コムパニ− | Device for measuring and monitoring state of filling of liquid vessel |
-
1978
- 1978-06-21 JP JP7419578A patent/JPS551530A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4402904A (en) * | 1980-12-18 | 1983-09-06 | Combustion Engineering, Inc. | Method for determining clad integrity of a nuclear fuel rod |
JPS59151021A (en) * | 1982-12-15 | 1984-08-29 | ウエストフエ−リツシエ・メタル・インドウストリ−・コムマンデイト・ゲゼルシヤフト・ヒユツク・ウント・コムパニ− | Device for measuring and monitoring state of filling of liquid vessel |
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