JPS5773980A - Semiconductor pressure converter - Google Patents

Semiconductor pressure converter

Info

Publication number
JPS5773980A
JPS5773980A JP15017880A JP15017880A JPS5773980A JP S5773980 A JPS5773980 A JP S5773980A JP 15017880 A JP15017880 A JP 15017880A JP 15017880 A JP15017880 A JP 15017880A JP S5773980 A JPS5773980 A JP S5773980A
Authority
JP
Japan
Prior art keywords
base
ceramic
hole
substrate
secured
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15017880A
Other languages
Japanese (ja)
Inventor
Shunji Shiromizu
Bunshiro Yamaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP15017880A priority Critical patent/JPS5773980A/en
Publication of JPS5773980A publication Critical patent/JPS5773980A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/147—Details about the mounting of the sensor to support or covering means

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)

Abstract

PURPOSE:To obtain a long-term stable sensor by forming a through hold at a base substrate when an Si base having a through hole at the center and a reduced pressure pellet on the surface is secured to a ceramic base substrate, forming a recess corresponding to the bottom surface of the Si base and filling solder glass for bonding. CONSTITUTION:A pressure sensitive pellet 54 sensing the pressure is secured onto a cylindrical Si base 56 having a through hole at the center. An annular insulating substrate 51 made of ceramic and an annular insulating substrate 51 made of ceramic having a conductive layer on the surface are formed on the base substrate 53 of ceramic package, and the base 56 thus formed is secured from the surface in sequence by the following method. That is, a through hole corresponding to the through hole of the base 56 is formed at the base 53, and a concentric recess 57 is formed at the periphery. Thereafter solder glass 58 is filled while filling in the recess 57 to the side wall 59, thereby securing the bottom of the base 56.
JP15017880A 1980-10-28 1980-10-28 Semiconductor pressure converter Pending JPS5773980A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15017880A JPS5773980A (en) 1980-10-28 1980-10-28 Semiconductor pressure converter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15017880A JPS5773980A (en) 1980-10-28 1980-10-28 Semiconductor pressure converter

Publications (1)

Publication Number Publication Date
JPS5773980A true JPS5773980A (en) 1982-05-08

Family

ID=15491204

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15017880A Pending JPS5773980A (en) 1980-10-28 1980-10-28 Semiconductor pressure converter

Country Status (1)

Country Link
JP (1) JPS5773980A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016511401A (en) * 2013-02-21 2016-04-14 エプコス アクチエンゲゼルシャフトＥｐｃｏｓ Ａｇ Sensor system
JP2016514254A (en) * 2013-02-21 2016-05-19 エプコス アクチエンゲゼルシャフトＥｐｃｏｓ Ａｇ Pressure sensor system

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016511401A (en) * 2013-02-21 2016-04-14 エプコス アクチエンゲゼルシャフトＥｐｃｏｓ Ａｇ Sensor system
JP2016514254A (en) * 2013-02-21 2016-05-19 エプコス アクチエンゲゼルシャフトＥｐｃｏｓ Ａｇ Pressure sensor system
US9909946B2 (en) 2013-02-21 2018-03-06 Epcos Ag Pressure sensor system

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