JPS56105647A - Probeboard - Google Patents
ProbeboardInfo
- Publication number
- JPS56105647A JPS56105647A JP757980A JP757980A JPS56105647A JP S56105647 A JPS56105647 A JP S56105647A JP 757980 A JP757980 A JP 757980A JP 757980 A JP757980 A JP 757980A JP S56105647 A JPS56105647 A JP S56105647A
- Authority
- JP
- Japan
- Prior art keywords
- probe
- hole
- vertical
- substrate
- measurement point
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
- Measuring Leads Or Probes (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
PURPOSE:To make measurement in high precision possible by a method wherein a vertical through hole is formed in a substrate corresponding to a measurement point to permit a probe with a spring to be inserted, fixed to the substrate on the top and in addition, wired, and a position fitting plate also is perforated the vertical through hole to be piled up. CONSTITUTION:The Al substrate 1 is perforated the vertical through hole 3 corresponding to a measurement point and formed with Al2O3 1a on the surface. A coiled spring 4a and the probe by a needle 4b are inserted into a small hole 3 and the spring at the end is soldered 5 on the top of the substrate to be connected with a lead wire 2. The position fitting plate 7 also has the vertical through hole corresponding to the measurement point and the hole into which the probe is inserted is tapered. With such a construction, a probe plate 1 is piled on the position fitting plate 7 after the position fitting with a waferchip using the position fitting plate 7, thereby allowing the position fittings of the probe and chip to easily be finished, the small hole 3 to guide the probe to correctly be connected to the measurement point and enabling the measurement in high precision to be made.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP757980A JPS5811741B2 (en) | 1980-01-25 | 1980-01-25 | probe board |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP757980A JPS5811741B2 (en) | 1980-01-25 | 1980-01-25 | probe board |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS56105647A true JPS56105647A (en) | 1981-08-22 |
JPS5811741B2 JPS5811741B2 (en) | 1983-03-04 |
Family
ID=11669715
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP757980A Expired - Lifetime JPS5811741B2 (en) | 1980-01-25 | 1980-01-25 | probe board |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5811741B2 (en) |
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58173841A (en) * | 1982-04-03 | 1983-10-12 | Nippon Denshi Zairyo Kk | Card for probe |
JPS5999264A (en) * | 1982-11-29 | 1984-06-07 | Yoshie Hasegawa | Fixed probe board |
JPS646564U (en) * | 1987-07-02 | 1989-01-13 | ||
JPH05326655A (en) * | 1992-07-22 | 1993-12-10 | Tokyo Electron Ltd | Measuring method of semiconductor wafer |
EP1113274A1 (en) * | 1998-07-10 | 2001-07-04 | Nhk Spring Co.Ltd. | Conductive contact |
JP2003066104A (en) * | 2001-08-22 | 2003-03-05 | Advantest Corp | Insert and electronic component handling apparatus having the same |
KR101171105B1 (en) | 2010-05-03 | 2012-08-03 | 퀄맥스시험기술 주식회사 | contact probe holder |
JP2013231626A (en) * | 2012-04-27 | 2013-11-14 | Honda Motor Co Ltd | Electrification inspection apparatus for semiconductor chip and electrification inspection method of semiconductor chip |
WO2014021194A1 (en) * | 2012-08-01 | 2014-02-06 | 日本電子材料株式会社 | Guide plate for probe guard and probe guard provided with same |
-
1980
- 1980-01-25 JP JP757980A patent/JPS5811741B2/en not_active Expired - Lifetime
Cited By (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58173841A (en) * | 1982-04-03 | 1983-10-12 | Nippon Denshi Zairyo Kk | Card for probe |
JPS5999264A (en) * | 1982-11-29 | 1984-06-07 | Yoshie Hasegawa | Fixed probe board |
JPH04228B2 (en) * | 1982-11-29 | 1992-01-06 | Yoshe Hasegawa | |
JPS646564U (en) * | 1987-07-02 | 1989-01-13 | ||
JPH05326655A (en) * | 1992-07-22 | 1993-12-10 | Tokyo Electron Ltd | Measuring method of semiconductor wafer |
EP1113274A1 (en) * | 1998-07-10 | 2001-07-04 | Nhk Spring Co.Ltd. | Conductive contact |
EP1113274A4 (en) * | 1998-07-10 | 2003-05-02 | Nhk Spring Co Ltd | Conductive contact |
JP4880120B2 (en) * | 1998-07-10 | 2012-02-22 | 日本発條株式会社 | Conductive contact |
JP2003066104A (en) * | 2001-08-22 | 2003-03-05 | Advantest Corp | Insert and electronic component handling apparatus having the same |
KR101171105B1 (en) | 2010-05-03 | 2012-08-03 | 퀄맥스시험기술 주식회사 | contact probe holder |
JP2013231626A (en) * | 2012-04-27 | 2013-11-14 | Honda Motor Co Ltd | Electrification inspection apparatus for semiconductor chip and electrification inspection method of semiconductor chip |
WO2014021194A1 (en) * | 2012-08-01 | 2014-02-06 | 日本電子材料株式会社 | Guide plate for probe guard and probe guard provided with same |
Also Published As
Publication number | Publication date |
---|---|
JPS5811741B2 (en) | 1983-03-04 |
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