JPS52115187A - Measuring needle for probe card - Google Patents

Measuring needle for probe card

Info

Publication number
JPS52115187A
JPS52115187A JP3120976A JP3120976A JPS52115187A JP S52115187 A JPS52115187 A JP S52115187A JP 3120976 A JP3120976 A JP 3120976A JP 3120976 A JP3120976 A JP 3120976A JP S52115187 A JPS52115187 A JP S52115187A
Authority
JP
Japan
Prior art keywords
probe card
measuring needle
needle
measuring
finer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3120976A
Other languages
Japanese (ja)
Inventor
Masuzo Ikumi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP3120976A priority Critical patent/JPS52115187A/en
Publication of JPS52115187A publication Critical patent/JPS52115187A/en
Pending legal-status Critical Current

Links

Landscapes

  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

PURPOSE: To increase the spring characteristics of a measuring needle for probe cards and make measurement more accurate by making the needle finer from the fixing side toward the needle tip side in tertiary curve form.
COPYRIGHT: (C)1977,JPO&Japio
JP3120976A 1976-03-24 1976-03-24 Measuring needle for probe card Pending JPS52115187A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3120976A JPS52115187A (en) 1976-03-24 1976-03-24 Measuring needle for probe card

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3120976A JPS52115187A (en) 1976-03-24 1976-03-24 Measuring needle for probe card

Publications (1)

Publication Number Publication Date
JPS52115187A true JPS52115187A (en) 1977-09-27

Family

ID=12325030

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3120976A Pending JPS52115187A (en) 1976-03-24 1976-03-24 Measuring needle for probe card

Country Status (1)

Country Link
JP (1) JPS52115187A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5525374U (en) * 1978-08-09 1980-02-19
JPH01284776A (en) * 1988-05-11 1989-11-16 Matsushita Electron Corp Measuring instrument for flat passage type semiconductor device
JPH0650989A (en) * 1992-07-28 1994-02-25 Nippon Maikuronikusu:Kk Manufacture of probe needle

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5525374U (en) * 1978-08-09 1980-02-19
JPS593582Y2 (en) * 1978-08-09 1984-01-31 日本電子材料株式会社 Semiconductor wafer testing probe
JPH01284776A (en) * 1988-05-11 1989-11-16 Matsushita Electron Corp Measuring instrument for flat passage type semiconductor device
JPH0650989A (en) * 1992-07-28 1994-02-25 Nippon Maikuronikusu:Kk Manufacture of probe needle

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