JPS52115187A - Measuring needle for probe card - Google Patents
Measuring needle for probe cardInfo
- Publication number
- JPS52115187A JPS52115187A JP3120976A JP3120976A JPS52115187A JP S52115187 A JPS52115187 A JP S52115187A JP 3120976 A JP3120976 A JP 3120976A JP 3120976 A JP3120976 A JP 3120976A JP S52115187 A JPS52115187 A JP S52115187A
- Authority
- JP
- Japan
- Prior art keywords
- probe card
- measuring needle
- needle
- measuring
- finer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Measuring Leads Or Probes (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
PURPOSE: To increase the spring characteristics of a measuring needle for probe cards and make measurement more accurate by making the needle finer from the fixing side toward the needle tip side in tertiary curve form.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3120976A JPS52115187A (en) | 1976-03-24 | 1976-03-24 | Measuring needle for probe card |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3120976A JPS52115187A (en) | 1976-03-24 | 1976-03-24 | Measuring needle for probe card |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS52115187A true JPS52115187A (en) | 1977-09-27 |
Family
ID=12325030
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3120976A Pending JPS52115187A (en) | 1976-03-24 | 1976-03-24 | Measuring needle for probe card |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52115187A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5525374U (en) * | 1978-08-09 | 1980-02-19 | ||
JPH01284776A (en) * | 1988-05-11 | 1989-11-16 | Matsushita Electron Corp | Measuring instrument for flat passage type semiconductor device |
JPH0650989A (en) * | 1992-07-28 | 1994-02-25 | Nippon Maikuronikusu:Kk | Manufacture of probe needle |
-
1976
- 1976-03-24 JP JP3120976A patent/JPS52115187A/en active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5525374U (en) * | 1978-08-09 | 1980-02-19 | ||
JPS593582Y2 (en) * | 1978-08-09 | 1984-01-31 | 日本電子材料株式会社 | Semiconductor wafer testing probe |
JPH01284776A (en) * | 1988-05-11 | 1989-11-16 | Matsushita Electron Corp | Measuring instrument for flat passage type semiconductor device |
JPH0650989A (en) * | 1992-07-28 | 1994-02-25 | Nippon Maikuronikusu:Kk | Manufacture of probe needle |
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