JPS6290981A - 赤外線検知素子の製造方法 - Google Patents
赤外線検知素子の製造方法Info
- Publication number
- JPS6290981A JPS6290981A JP60219339A JP21933985A JPS6290981A JP S6290981 A JPS6290981 A JP S6290981A JP 60219339 A JP60219339 A JP 60219339A JP 21933985 A JP21933985 A JP 21933985A JP S6290981 A JPS6290981 A JP S6290981A
- Authority
- JP
- Japan
- Prior art keywords
- film
- wafer
- sensing element
- infrared sensing
- protective film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 13
- 230000001681 protective effect Effects 0.000 claims abstract description 23
- 229910052751 metal Inorganic materials 0.000 claims abstract description 17
- 239000002184 metal Substances 0.000 claims abstract description 16
- 150000001875 compounds Chemical class 0.000 claims abstract description 14
- 239000004065 semiconductor Substances 0.000 claims abstract description 13
- 239000000758 substrate Substances 0.000 claims abstract description 12
- 238000007743 anodising Methods 0.000 claims description 3
- 239000011159 matrix material Substances 0.000 claims description 2
- 230000003647 oxidation Effects 0.000 abstract description 15
- 238000007254 oxidation reaction Methods 0.000 abstract description 15
- 239000003814 drug Substances 0.000 abstract 2
- 239000010407 anodic oxide Substances 0.000 description 12
- 238000000034 method Methods 0.000 description 11
- 238000005530 etching Methods 0.000 description 5
- 239000000126 substance Substances 0.000 description 4
- 241000257465 Echinoidea Species 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000000206 photolithography Methods 0.000 description 3
- 239000003795 chemical substances by application Substances 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 238000001883 metal evaporation Methods 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 229910004613 CdTe Inorganic materials 0.000 description 1
- 238000002048 anodisation reaction Methods 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 230000002747 voluntary effect Effects 0.000 description 1
Landscapes
- Light Receiving Elements (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60219339A JPS6290981A (ja) | 1985-10-02 | 1985-10-02 | 赤外線検知素子の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60219339A JPS6290981A (ja) | 1985-10-02 | 1985-10-02 | 赤外線検知素子の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6290981A true JPS6290981A (ja) | 1987-04-25 |
| JPH0449271B2 JPH0449271B2 (enrdf_load_stackoverflow) | 1992-08-11 |
Family
ID=16733903
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60219339A Granted JPS6290981A (ja) | 1985-10-02 | 1985-10-02 | 赤外線検知素子の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6290981A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008546177A (ja) * | 2005-05-16 | 2008-12-18 | Ｉｉ−Ｖｉ インコーポレイテッド | 高性能のＣｄｘＺｎ１−ｘＴｅ（０≦ｘ≦１）のＸ線及びγ線の放射線検出器およびその製造方法 |
-
1985
- 1985-10-02 JP JP60219339A patent/JPS6290981A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008546177A (ja) * | 2005-05-16 | 2008-12-18 | Ｉｉ−Ｖｉ インコーポレイテッド | 高性能のＣｄｘＺｎ１−ｘＴｅ（０≦ｘ≦１）のＸ線及びγ線の放射線検出器およびその製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0449271B2 (enrdf_load_stackoverflow) | 1992-08-11 |
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