JPS6290981A - 赤外線検知素子の製造方法 - Google Patents

赤外線検知素子の製造方法

Info

Publication number
JPS6290981A
JPS6290981A JP60219339A JP21933985A JPS6290981A JP S6290981 A JPS6290981 A JP S6290981A JP 60219339 A JP60219339 A JP 60219339A JP 21933985 A JP21933985 A JP 21933985A JP S6290981 A JPS6290981 A JP S6290981A
Authority
JP
Japan
Prior art keywords
film
wafer
sensing element
infrared sensing
protective film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60219339A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0449271B2 (enrdf_load_stackoverflow
Inventor
Yasuaki Yoshida
保明 吉田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP60219339A priority Critical patent/JPS6290981A/ja
Publication of JPS6290981A publication Critical patent/JPS6290981A/ja
Publication of JPH0449271B2 publication Critical patent/JPH0449271B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Light Receiving Elements (AREA)
JP60219339A 1985-10-02 1985-10-02 赤外線検知素子の製造方法 Granted JPS6290981A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60219339A JPS6290981A (ja) 1985-10-02 1985-10-02 赤外線検知素子の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60219339A JPS6290981A (ja) 1985-10-02 1985-10-02 赤外線検知素子の製造方法

Publications (2)

Publication Number Publication Date
JPS6290981A true JPS6290981A (ja) 1987-04-25
JPH0449271B2 JPH0449271B2 (enrdf_load_stackoverflow) 1992-08-11

Family

ID=16733903

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60219339A Granted JPS6290981A (ja) 1985-10-02 1985-10-02 赤外線検知素子の製造方法

Country Status (1)

Country Link
JP (1) JPS6290981A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008546177A (ja) * 2005-05-16 2008-12-18 Ｉｉ−Ｖｉ インコーポレイテッド 高性能のＣｄｘＺｎ１−ｘＴｅ（０≦ｘ≦１）のＸ線及びγ線の放射線検出器およびその製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008546177A (ja) * 2005-05-16 2008-12-18 Ｉｉ−Ｖｉ インコーポレイテッド 高性能のＣｄｘＺｎ１−ｘＴｅ（０≦ｘ≦１）のＸ線及びγ線の放射線検出器およびその製造方法

Also Published As

Publication number Publication date
JPH0449271B2 (enrdf_load_stackoverflow) 1992-08-11

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