JPH0449271B2 - - Google Patents
Info
- Publication number
- JPH0449271B2 JPH0449271B2 JP60219339A JP21933985A JPH0449271B2 JP H0449271 B2 JPH0449271 B2 JP H0449271B2 JP 60219339 A JP60219339 A JP 60219339A JP 21933985 A JP21933985 A JP 21933985A JP H0449271 B2 JPH0449271 B2 JP H0449271B2
- Authority
- JP
- Japan
- Prior art keywords
- film
- infrared sensing
- sensing element
- protective film
- forming
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000001681 protective effect Effects 0.000 claims description 27
- 239000002184 metal Substances 0.000 claims description 21
- 150000001875 compounds Chemical class 0.000 claims description 15
- 239000004065 semiconductor Substances 0.000 claims description 15
- 239000000758 substrate Substances 0.000 claims description 11
- 238000004519 manufacturing process Methods 0.000 claims description 9
- 238000000034 method Methods 0.000 claims description 9
- 238000007743 anodising Methods 0.000 claims description 2
- 238000000151 deposition Methods 0.000 claims 2
- 239000010407 anodic oxide Substances 0.000 description 17
- 230000003647 oxidation Effects 0.000 description 8
- 238000007254 oxidation reaction Methods 0.000 description 8
- 238000005530 etching Methods 0.000 description 6
- 229910000661 Mercury cadmium telluride Inorganic materials 0.000 description 4
- 238000000206 photolithography Methods 0.000 description 4
- 239000000126 substance Substances 0.000 description 4
- 238000007740 vapor deposition Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 238000002048 anodisation reaction Methods 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
Landscapes
- Light Receiving Elements (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60219339A JPS6290981A (ja) | 1985-10-02 | 1985-10-02 | 赤外線検知素子の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60219339A JPS6290981A (ja) | 1985-10-02 | 1985-10-02 | 赤外線検知素子の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6290981A JPS6290981A (ja) | 1987-04-25 |
| JPH0449271B2 true JPH0449271B2 (enrdf_load_stackoverflow) | 1992-08-11 |
Family
ID=16733903
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60219339A Granted JPS6290981A (ja) | 1985-10-02 | 1985-10-02 | 赤外線検知素子の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6290981A (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008546177A (ja) * | 2005-05-16 | 2008-12-18 | Ｉｉ−Ｖｉ インコーポレイテッド | 高性能のＣｄｘＺｎ１−ｘＴｅ（０≦ｘ≦１）のＸ線及びγ線の放射線検出器およびその製造方法 |
-
1985
- 1985-10-02 JP JP60219339A patent/JPS6290981A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6290981A (ja) | 1987-04-25 |
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