JPS628064Y2 - - Google Patents
Info
- Publication number
- JPS628064Y2 JPS628064Y2 JP1985179489U JP17948985U JPS628064Y2 JP S628064 Y2 JPS628064 Y2 JP S628064Y2 JP 1985179489 U JP1985179489 U JP 1985179489U JP 17948985 U JP17948985 U JP 17948985U JP S628064 Y2 JPS628064 Y2 JP S628064Y2
- Authority
- JP
- Japan
- Prior art keywords
- liquid crystal
- aluminum
- layer
- drive electrode
- wiring layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 229910052782 aluminium Inorganic materials 0.000 claims description 44
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 44
- 239000004973 liquid crystal related substance Substances 0.000 claims description 41
- 239000000758 substrate Substances 0.000 claims description 30
- 239000004065 semiconductor Substances 0.000 claims description 21
- 229910000838 Al alloy Inorganic materials 0.000 claims description 7
- 238000001953 recrystallisation Methods 0.000 claims description 7
- 239000011159 matrix material Substances 0.000 claims description 5
- 239000010410 layer Substances 0.000 description 48
- 239000010408 film Substances 0.000 description 26
- 238000000034 method Methods 0.000 description 17
- 239000010409 thin film Substances 0.000 description 11
- 238000010586 diagram Methods 0.000 description 9
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 7
- 239000011521 glass Substances 0.000 description 7
- 229910052710 silicon Inorganic materials 0.000 description 7
- 239000010703 silicon Substances 0.000 description 7
- 230000002087 whitening effect Effects 0.000 description 7
- 230000003068 static effect Effects 0.000 description 5
- 238000009792 diffusion process Methods 0.000 description 4
- 238000004544 sputter deposition Methods 0.000 description 3
- 239000012463 white pigment Substances 0.000 description 3
- AZDRQVAHHNSJOQ-UHFFFAOYSA-N alumane Chemical group [AlH3] AZDRQVAHHNSJOQ-UHFFFAOYSA-N 0.000 description 2
- 239000003990 capacitor Substances 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 125000006850 spacer group Chemical group 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 239000004988 Nematic liquid crystal Substances 0.000 description 1
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
- 229910001361 White metal Inorganic materials 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000012299 nitrogen atmosphere Substances 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 239000000049 pigment Substances 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 239000002244 precipitate Substances 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
- 239000010969 white metal Substances 0.000 description 1
Landscapes
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985179489U JPS628064Y2 (fr) | 1985-11-21 | 1985-11-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985179489U JPS628064Y2 (fr) | 1985-11-21 | 1985-11-21 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61106980U JPS61106980U (fr) | 1986-07-07 |
| JPS628064Y2 true JPS628064Y2 (fr) | 1987-02-25 |
Family
ID=30737056
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985179489U Expired JPS628064Y2 (fr) | 1985-11-21 | 1985-11-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS628064Y2 (fr) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5437697A (en) * | 1977-08-30 | 1979-03-20 | Sharp Corp | Liquid crystal display unit of matrix type |
-
1985
- 1985-11-21 JP JP1985179489U patent/JPS628064Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5437697A (en) * | 1977-08-30 | 1979-03-20 | Sharp Corp | Liquid crystal display unit of matrix type |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61106980U (fr) | 1986-07-07 |
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