JPS6273739A - 多層配線の形成方法 - Google Patents

多層配線の形成方法

Info

Publication number
JPS6273739A
JPS6273739A JP21240185A JP21240185A JPS6273739A JP S6273739 A JPS6273739 A JP S6273739A JP 21240185 A JP21240185 A JP 21240185A JP 21240185 A JP21240185 A JP 21240185A JP S6273739 A JPS6273739 A JP S6273739A
Authority
JP
Japan
Prior art keywords
forming
layer
resin layer
resistant resin
photosensitive heat
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP21240185A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0528500B2 (enExample
Inventor
Mitsuo Yoshimoto
吉本　光雄
Akihiro Kenmochi
釼持　秋広
Tsuneaki Kamei
亀井　常彰
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP21240185A priority Critical patent/JPS6273739A/ja
Publication of JPS6273739A publication Critical patent/JPS6273739A/ja
Publication of JPH0528500B2 publication Critical patent/JPH0528500B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Local Oxidation Of Silicon (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP21240185A 1985-09-27 1985-09-27 多層配線の形成方法 Granted JPS6273739A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP21240185A JPS6273739A (ja) 1985-09-27 1985-09-27 多層配線の形成方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21240185A JPS6273739A (ja) 1985-09-27 1985-09-27 多層配線の形成方法

Publications (2)

Publication Number Publication Date
JPS6273739A true JPS6273739A (ja) 1987-04-04
JPH0528500B2 JPH0528500B2 (enExample) 1993-04-26

Family

ID=16621972

Family Applications (1)

Application Number Title Priority Date Filing Date
JP21240185A Granted JPS6273739A (ja) 1985-09-27 1985-09-27 多層配線の形成方法

Country Status (1)

Country Link
JP (1) JPS6273739A (enExample)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56111296A (en) * 1980-02-08 1981-09-02 Tokyo Shibaura Electric Co Method of forming multilayer wire
JPS5893240A (ja) * 1981-11-30 1983-06-02 Japan Synthetic Rubber Co Ltd 半導体装置及びその製造方法
JPS5915943A (ja) * 1982-07-20 1984-01-27 Konishiroku Photo Ind Co Ltd 静電記録体
JPS59159543A (ja) * 1983-03-02 1984-09-10 Hitachi Ltd 配線構造体およびその製造方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56111296A (en) * 1980-02-08 1981-09-02 Tokyo Shibaura Electric Co Method of forming multilayer wire
JPS5893240A (ja) * 1981-11-30 1983-06-02 Japan Synthetic Rubber Co Ltd 半導体装置及びその製造方法
JPS5915943A (ja) * 1982-07-20 1984-01-27 Konishiroku Photo Ind Co Ltd 静電記録体
JPS59159543A (ja) * 1983-03-02 1984-09-10 Hitachi Ltd 配線構造体およびその製造方法

Also Published As

Publication number Publication date
JPH0528500B2 (enExample) 1993-04-26

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