JPS6259893B2 - - Google Patents

Info

Publication number
JPS6259893B2
JPS6259893B2 JP56157654A JP15765481A JPS6259893B2 JP S6259893 B2 JPS6259893 B2 JP S6259893B2 JP 56157654 A JP56157654 A JP 56157654A JP 15765481 A JP15765481 A JP 15765481A JP S6259893 B2 JPS6259893 B2 JP S6259893B2
Authority
JP
Japan
Prior art keywords
film
polycrystalline silicon
silicon film
melting point
high melting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56157654A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5858753A (ja
Inventor
Kazuhiko Tsuji
Shozo Okada
Nobuyasu Hase
Masanori Fukumoto
Shinichi Ogawa
Koichi Kugimya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP56157654A priority Critical patent/JPS5858753A/ja
Publication of JPS5858753A publication Critical patent/JPS5858753A/ja
Publication of JPS6259893B2 publication Critical patent/JPS6259893B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Semiconductor Integrated Circuits (AREA)
JP56157654A 1981-10-02 1981-10-02 半導体装置およびその製造方法 Granted JPS5858753A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56157654A JPS5858753A (ja) 1981-10-02 1981-10-02 半導体装置およびその製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56157654A JPS5858753A (ja) 1981-10-02 1981-10-02 半導体装置およびその製造方法

Publications (2)

Publication Number Publication Date
JPS5858753A JPS5858753A (ja) 1983-04-07
JPS6259893B2 true JPS6259893B2 (enrdf_load_stackoverflow) 1987-12-14

Family

ID=15654445

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56157654A Granted JPS5858753A (ja) 1981-10-02 1981-10-02 半導体装置およびその製造方法

Country Status (1)

Country Link
JP (1) JPS5858753A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59232456A (ja) * 1983-06-16 1984-12-27 Hitachi Ltd 薄膜回路素子

Also Published As

Publication number Publication date
JPS5858753A (ja) 1983-04-07

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