JPS6255701B2 - - Google Patents

Info

Publication number
JPS6255701B2
JPS6255701B2 JP55033648A JP3364880A JPS6255701B2 JP S6255701 B2 JPS6255701 B2 JP S6255701B2 JP 55033648 A JP55033648 A JP 55033648A JP 3364880 A JP3364880 A JP 3364880A JP S6255701 B2 JPS6255701 B2 JP S6255701B2
Authority
JP
Japan
Prior art keywords
film
wiring
insulating film
wiring body
forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP55033648A
Other languages
English (en)
Japanese (ja)
Other versions
JPS56130951A (en
Inventor
Hiroshi Tokunaga
Ryoji Abe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP3364880A priority Critical patent/JPS56130951A/ja
Publication of JPS56130951A publication Critical patent/JPS56130951A/ja
Publication of JPS6255701B2 publication Critical patent/JPS6255701B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Weting (AREA)
JP3364880A 1980-03-17 1980-03-17 Manufacture of semiconductor device Granted JPS56130951A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3364880A JPS56130951A (en) 1980-03-17 1980-03-17 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3364880A JPS56130951A (en) 1980-03-17 1980-03-17 Manufacture of semiconductor device

Publications (2)

Publication Number Publication Date
JPS56130951A JPS56130951A (en) 1981-10-14
JPS6255701B2 true JPS6255701B2 (enrdf_load_stackoverflow) 1987-11-20

Family

ID=12392261

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3364880A Granted JPS56130951A (en) 1980-03-17 1980-03-17 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS56130951A (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60261156A (ja) * 1984-06-08 1985-12-24 Nippon Telegr & Teleph Corp <Ntt> 多層配線の形成法
EP0175604B1 (en) * 1984-08-23 1989-07-19 Fairchild Semiconductor Corporation A process for forming vias on integrated circuits

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4835778A (enrdf_load_stackoverflow) * 1971-09-09 1973-05-26

Also Published As

Publication number Publication date
JPS56130951A (en) 1981-10-14

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