JPS6246512B2 - - Google Patents
Info
- Publication number
- JPS6246512B2 JPS6246512B2 JP54138728A JP13872879A JPS6246512B2 JP S6246512 B2 JPS6246512 B2 JP S6246512B2 JP 54138728 A JP54138728 A JP 54138728A JP 13872879 A JP13872879 A JP 13872879A JP S6246512 B2 JPS6246512 B2 JP S6246512B2
- Authority
- JP
- Japan
- Prior art keywords
- aln
- thermal conductivity
- silicon
- sintered body
- phase
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 claims description 26
- 229910052710 silicon Inorganic materials 0.000 claims description 17
- 239000010703 silicon Substances 0.000 claims description 17
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 15
- 229910052760 oxygen Inorganic materials 0.000 claims description 15
- 239000001301 oxygen Substances 0.000 claims description 15
- 238000005245 sintering Methods 0.000 claims description 11
- 239000002470 thermal conductor Substances 0.000 claims description 8
- 150000001875 compounds Chemical class 0.000 claims description 7
- 238000004519 manufacturing process Methods 0.000 claims description 6
- 239000011812 mixed powder Substances 0.000 claims description 6
- 239000000919 ceramic Substances 0.000 claims description 5
- 230000001590 oxidative effect Effects 0.000 claims description 3
- 239000012071 phase Substances 0.000 description 17
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 16
- 229910052596 spinel Inorganic materials 0.000 description 9
- 239000011029 spinel Substances 0.000 description 9
- 230000015572 biosynthetic process Effects 0.000 description 7
- 238000002441 X-ray diffraction Methods 0.000 description 6
- 230000000694 effects Effects 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 238000002156 mixing Methods 0.000 description 5
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 239000007791 liquid phase Substances 0.000 description 4
- 239000000463 material Substances 0.000 description 3
- 229910052757 nitrogen Inorganic materials 0.000 description 3
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 3
- 239000000843 powder Substances 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- PIGFYZPCRLYGLF-UHFFFAOYSA-N Aluminum nitride Chemical compound [Al]#N PIGFYZPCRLYGLF-UHFFFAOYSA-N 0.000 description 2
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 229910002804 graphite Inorganic materials 0.000 description 2
- 239000010439 graphite Substances 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 238000007088 Archimedes method Methods 0.000 description 1
- 229910052582 BN Inorganic materials 0.000 description 1
- LTPBRCUWZOMYOC-UHFFFAOYSA-N Beryllium oxide Chemical compound O=[Be] LTPBRCUWZOMYOC-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910006360 Si—O—N Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910021417 amorphous silicon Inorganic materials 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000013329 compounding Methods 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 239000013078 crystal Chemical group 0.000 description 1
- 229910021419 crystalline silicon Inorganic materials 0.000 description 1
- 235000019441 ethanol Nutrition 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 230000001988 toxicity Effects 0.000 description 1
- 231100000419 toxicity Toxicity 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D3/00—Charging; Discharging; Manipulation of charge
- F27D3/02—Skids or tracks for heavy objects
- F27D3/022—Skids
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Ceramic Products (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13872879A JPS5663878A (en) | 1979-10-29 | 1979-10-29 | Manufacture of ceramic heat conductive body |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13872879A JPS5663878A (en) | 1979-10-29 | 1979-10-29 | Manufacture of ceramic heat conductive body |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5663878A JPS5663878A (en) | 1981-05-30 |
| JPS6246512B2 true JPS6246512B2 (enrdf_load_stackoverflow) | 1987-10-02 |
Family
ID=15228760
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13872879A Granted JPS5663878A (en) | 1979-10-29 | 1979-10-29 | Manufacture of ceramic heat conductive body |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5663878A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0278209U (enrdf_load_stackoverflow) * | 1988-11-29 | 1990-06-15 |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5950078A (ja) * | 1982-09-17 | 1984-03-22 | 株式会社トクヤマ | 窒化アルミニウム焼結体およびその製造方法 |
| US4478785A (en) * | 1983-08-01 | 1984-10-23 | General Electric Company | Process of pressureless sintering to produce dense, high thermal conductivity aluminum nitride ceramic body |
| JPS6217074A (ja) * | 1985-07-12 | 1987-01-26 | 電気化学工業株式会社 | 焼結用窒化アルミニウム混合粉末の製造法 |
| JP2611290B2 (ja) * | 1987-12-17 | 1997-05-21 | 株式会社村田製作所 | 高熱伝導性セラミック基板の製造方法 |
| JP2901135B2 (ja) * | 1994-10-24 | 1999-06-07 | 株式会社東芝 | 半導体装置 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4934507A (enrdf_load_stackoverflow) * | 1972-07-31 | 1974-03-30 | ||
| JPS56389B2 (enrdf_load_stackoverflow) * | 1975-08-06 | 1981-01-07 | ||
| JPS54100410A (en) * | 1978-01-24 | 1979-08-08 | Tokyo Shibaura Electric Co | Ceramic heat conductor |
-
1979
- 1979-10-29 JP JP13872879A patent/JPS5663878A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0278209U (enrdf_load_stackoverflow) * | 1988-11-29 | 1990-06-15 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5663878A (en) | 1981-05-30 |
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