JPS6245691B2 - - Google Patents

Info

Publication number
JPS6245691B2
JPS6245691B2 JP57135294A JP13529482A JPS6245691B2 JP S6245691 B2 JPS6245691 B2 JP S6245691B2 JP 57135294 A JP57135294 A JP 57135294A JP 13529482 A JP13529482 A JP 13529482A JP S6245691 B2 JPS6245691 B2 JP S6245691B2
Authority
JP
Japan
Prior art keywords
cathode
matrix
pattern
cathodes
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP57135294A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5828837A (ja
Inventor
Gegoriusu Petorusu Fuan Gorukomu Gerarudosu
Marii Yuujeenu Heberehitsu Aasaa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Koninklijke Philips Electronics NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Koninklijke Philips Electronics NV filed Critical Koninklijke Philips Electronics NV
Publication of JPS5828837A publication Critical patent/JPS5828837A/ja
Publication of JPS6245691B2 publication Critical patent/JPS6245691B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
    • H01J37/3174—Particle-beam lithography, e.g. electron beam lithography
    • H01J37/3175—Projection methods, i.e. transfer substantially complete pattern to substrate
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00—Manufacture or treatment of nanostructures
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/30—Cold cathodes, e.g. field-emissive cathode
    • H01J1/308—Semiconductor cathodes, e.g. cathodes with PN junction layers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/30—Electron or ion beam tubes for processing objects
    • H01J2237/317—Processing objects on a microscale
    • H01J2237/3175—Lithography
    • H01J2237/31777—Lithography by projection
    • H01J2237/31781—Lithography by projection from patterned cold cathode
    • H01J2237/31784—Semiconductor cathode

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Theoretical Computer Science (AREA)
  • Mathematical Physics (AREA)
  • Analytical Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Cold Cathode And The Manufacture (AREA)
  • Electron Beam Exposure (AREA)
  • Electrodes For Cathode-Ray Tubes (AREA)
  • Cathode-Ray Tubes And Fluorescent Screens For Display (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Semiconductor Memories (AREA)
  • Bipolar Transistors (AREA)
JP57135294A 1978-01-27 1982-08-04 超小型ソリツドステ−ト装置の製造方法 Granted JPS5828837A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
NLAANVRAGE7800987,A NL184549C (nl) 1978-01-27 1978-01-27 Halfgeleiderinrichting voor het opwekken van een elektronenstroom en weergeefinrichting voorzien van een dergelijke halfgeleiderinrichting.
NL7800987 1978-01-27

Publications (2)

Publication Number Publication Date
JPS5828837A JPS5828837A (ja) 1983-02-19
JPS6245691B2 true JPS6245691B2 (US07541385-20090602-C00001.png) 1987-09-28

Family

ID=19830234

Family Applications (4)

Application Number Title Priority Date Filing Date
JP770279A Granted JPS54111272A (en) 1978-01-27 1979-01-27 Electron current generating semiconductor* method of fabricating same and device for applying same
JP57135294A Granted JPS5828837A (ja) 1978-01-27 1982-08-04 超小型ソリツドステ−ト装置の製造方法
JP60035420A Pending JPS60241627A (ja) 1978-01-27 1985-02-26 電子流発生用半導体装置を具える撮像装置
JP60035419A Pending JPS60241626A (ja) 1978-01-27 1985-02-26 電子流発生用半導体装置を具える表示装置

Family Applications Before (1)

Application Number Title Priority Date Filing Date
JP770279A Granted JPS54111272A (en) 1978-01-27 1979-01-27 Electron current generating semiconductor* method of fabricating same and device for applying same

Family Applications After (2)

Application Number Title Priority Date Filing Date
JP60035420A Pending JPS60241627A (ja) 1978-01-27 1985-02-26 電子流発生用半導体装置を具える撮像装置
JP60035419A Pending JPS60241626A (ja) 1978-01-27 1985-02-26 電子流発生用半導体装置を具える表示装置

Country Status (14)

Country Link
US (3) US4259678A (US07541385-20090602-C00001.png)
JP (4) JPS54111272A (US07541385-20090602-C00001.png)
AT (1) AT375782B (US07541385-20090602-C00001.png)
AU (1) AU521540B2 (US07541385-20090602-C00001.png)
BE (1) BE873713A (US07541385-20090602-C00001.png)
CA (1) CA1131795A (US07541385-20090602-C00001.png)
CH (1) CH640979A5 (US07541385-20090602-C00001.png)
DE (1) DE2902746C2 (US07541385-20090602-C00001.png)
ES (1) ES477148A1 (US07541385-20090602-C00001.png)
FR (1) FR2415879A1 (US07541385-20090602-C00001.png)
GB (2) GB2068169B (US07541385-20090602-C00001.png)
IT (1) IT1110930B (US07541385-20090602-C00001.png)
NL (1) NL184549C (US07541385-20090602-C00001.png)
SE (1) SE438572B (US07541385-20090602-C00001.png)

Families Citing this family (74)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL184549C (nl) * 1978-01-27 1989-08-16 Philips Nv Halfgeleiderinrichting voor het opwekken van een elektronenstroom en weergeefinrichting voorzien van een dergelijke halfgeleiderinrichting.
NL184589C (nl) * 1979-07-13 1989-09-01 Philips Nv Halfgeleiderinrichting voor het opwekken van een elektronenbundel en werkwijze voor het vervaardigen van een dergelijke halfgeleiderinrichting.
JPS5925387B2 (ja) * 1980-06-10 1984-06-16 株式会社東芝 半導体装置
US4683399A (en) * 1981-06-29 1987-07-28 Rockwell International Corporation Silicon vacuum electron devices
NL8104893A (nl) * 1981-10-29 1983-05-16 Philips Nv Kathodestraalbuis en halfgeleiderinrichting voor toepassing in een dergelijke kathodestraalbuis.
GB2109159B (en) * 1981-11-06 1985-05-30 Philips Electronic Associated Semiconductor electron source for display tubes and other equipment
GB2109160B (en) * 1981-11-06 1985-05-30 Philips Electronic Associated Semiconductor electron source for display tubes and other equipment
NL8200875A (nl) * 1982-03-04 1983-10-03 Philips Nv Inrichting voor het opnemen of weergeven van beelden en halfgeleiderinrichting voor toepassing in een dergelijke inrichting.
GB2146168A (en) * 1983-09-05 1985-04-11 Philips Electronic Associated Electron image projector
GB2147141A (en) * 1983-09-26 1985-05-01 Philips Electronic Associated Electron image projector
NL8403537A (nl) * 1984-11-21 1986-06-16 Philips Nv Kathodestraalbuis met ionenval.
DE3538175C2 (de) * 1984-11-21 1996-06-05 Philips Electronics Nv Halbleiteranordnung zum Erzeugen eines Elektronenstromes und ihre Verwendung
NL8403613A (nl) * 1984-11-28 1986-06-16 Philips Nv Elektronenbundelinrichting en halfgeleiderinrichting voor een dergelijke inrichting.
NL8500413A (nl) * 1985-02-14 1986-09-01 Philips Nv Electronenbundelapparaat met een halfgeleider electronenemitter.
CN86105432A (zh) * 1985-09-27 1987-05-27 美国电话电报公司 带电粒子束曝光
US4742234A (en) * 1985-09-27 1988-05-03 American Telephone And Telegraph Company, At&T Bell Laboratories Charged-particle-beam lithography
GB2183899A (en) * 1985-11-29 1987-06-10 Philips Electronic Associated Electron beam addressed memory
US4763043A (en) * 1985-12-23 1988-08-09 Raytheon Company P-N junction semiconductor secondary emission cathode and tube
JPS62155517A (ja) * 1985-12-27 1987-07-10 Canon Inc パターン描画装置及び方法
GB8601421D0 (en) * 1986-01-21 1986-02-26 Welding Inst Charged particle beam generator
FR2595162B1 (fr) * 1986-02-28 1988-05-06 Labo Electronique Physique Dispositif d'enregistrement et de restitution de signaux electriques muni d'un predeclenchement, comprenant un dispositif a transfert de charges et oscilloscope utilisant un tel dispositif
NL8600675A (nl) * 1986-03-17 1987-10-16 Philips Nv Halfgeleiderinrichting voor het opwekken van een elektronenstroom.
DE3712473A1 (de) * 1986-04-14 1987-10-15 Canon Kk Bildaufzeichnungs- und/oder bildwiedergabeeinrichtung
US5025196A (en) * 1986-06-02 1991-06-18 Canon Kabushiki Kaisha Image forming device with beam current control
JPS62284590A (ja) * 1986-06-02 1987-12-10 Canon Inc 画像形成装置
US4858062A (en) * 1986-06-04 1989-08-15 Canon Kabushiki Kaisha Charging device
JPH0715603B2 (ja) * 1986-06-04 1995-02-22 キヤノン株式会社 帯電方法
US5691608A (en) * 1986-06-16 1997-11-25 Canon Kabushiki Kaisha Image display apparatus
US4906894A (en) * 1986-06-19 1990-03-06 Canon Kabushiki Kaisha Photoelectron beam converting device and method of driving the same
DE3788318T2 (de) * 1986-06-23 1994-06-16 Canon Kk Verfahren und Anordnung zur Datenübertragung unter Verwendung eines Elektronenstrahls.
JPS6312517A (ja) * 1986-07-02 1988-01-19 Hitachi Ltd 部品の位置決め機構
US4857799A (en) * 1986-07-30 1989-08-15 Sri International Matrix-addressed flat panel display
JPS6334847A (ja) * 1986-07-30 1988-02-15 Canon Inc 発光装置
JPH0821313B2 (ja) * 1986-08-12 1996-03-04 キヤノン株式会社 固体電子ビ−ム発生装置
US5270990A (en) * 1986-08-15 1993-12-14 Canon Kabushiki Kaisha Tracking error signal detecting apparatus using an electron beam and apparatus for effecting recording/reproduction of information by the utilization of a plurality of electron beams
EP0257489A1 (en) * 1986-08-15 1988-03-02 Canon Kabushiki Kaisha Method for generating a sound wave by utilizing electron rays etc., and optical device for controlling a light by an elastic wave generated by said method
US4958104A (en) * 1986-08-20 1990-09-18 Canon Kabushiki Kaisha Display device having first and second cold cathodes
JPS6351035A (ja) * 1986-08-20 1988-03-04 Canon Inc 蓄積型画像表示装置
JP2601464B2 (ja) * 1986-12-16 1997-04-16 キヤノン株式会社 電子放出素子
JPS63105437A (ja) * 1986-10-22 1988-05-10 Canon Inc 画像形成装置
NL8700486A (nl) * 1987-02-27 1988-09-16 Philips Nv Weergeefinrichting.
JPS63269529A (ja) * 1987-04-28 1988-11-07 Canon Inc 荷電ビ−ム装置
EP0289279B1 (en) * 1987-04-28 1994-08-10 Canon Kabushiki Kaisha A multi-electron-beam pattern drawing apparatus
JPS63269445A (ja) * 1987-04-28 1988-11-07 Canon Inc 電子ビーム発生素子
JP2599591B2 (ja) * 1987-04-28 1997-04-09 キヤノン株式会社 電子放出素子特性測定装置
USRE40062E1 (en) * 1987-07-15 2008-02-12 Canon Kabushiki Kaisha Display device with electron-emitting device with electron-emitting region insulated from electrodes
DE3853744T2 (de) * 1987-07-15 1996-01-25 Canon Kk Elektronenemittierende Vorrichtung.
USRE39633E1 (en) * 1987-07-15 2007-05-15 Canon Kabushiki Kaisha Display device with electron-emitting device with electron-emitting region insulated from electrodes
USRE40566E1 (en) * 1987-07-15 2008-11-11 Canon Kabushiki Kaisha Flat panel display including electron emitting device
US5749763A (en) * 1987-07-15 1998-05-12 Canon Kabushiki Kaisha Display device with electron-emitting device with electron-emitting region insulted from electrodes
NL8702570A (nl) * 1987-10-29 1989-05-16 Philips Nv Geladen deeltjes bundel apparaat.
NL8702829A (nl) * 1987-11-26 1989-06-16 Philips Nv Weergeefinrichting.
JP2788243B2 (ja) * 1988-02-27 1998-08-20 キヤノン株式会社 半導体電子放出素子及び半導体電子放出装置
US5285129A (en) * 1988-05-31 1994-02-08 Canon Kabushiki Kaisha Segmented electron emission device
FR2637126B1 (fr) * 1988-09-23 1992-05-07 Thomson Csf Composant tel que diode, triode ou dispositif d'affichage cathodoluminescent plat et integre, et procede de fabrication
DE69033677T2 (de) * 1989-09-04 2001-05-23 Canon K.K., Tokio/Tokyo Elektronenemissionselement- und Herstellungsverfahren desselben
US5814832A (en) * 1989-09-07 1998-09-29 Canon Kabushiki Kaisha Electron emitting semiconductor device
US5202571A (en) * 1990-07-06 1993-04-13 Canon Kabushiki Kaisha Electron emitting device with diamond
JPH0536369A (ja) * 1990-09-25 1993-02-12 Canon Inc 電子ビーム装置及びその駆動方法
JPH0512988A (ja) * 1990-10-13 1993-01-22 Canon Inc 半導体電子放出素子
US5166709A (en) * 1991-02-06 1992-11-24 Delphax Systems Electron DC printer
US5144191A (en) * 1991-06-12 1992-09-01 Mcnc Horizontal microelectronic field emission devices
JPH0513136A (ja) * 1991-06-28 1993-01-22 Nec Corp Ｉｃソケツト
EP0532019B1 (en) * 1991-09-13 1997-12-29 Canon Kabushiki Kaisha Semiconductor electron emission device
JP2723405B2 (ja) * 1991-11-12 1998-03-09 松下電器産業株式会社 微細電極の形成方法
FR2685811A1 (fr) * 1991-12-31 1993-07-02 Commissariat Energie Atomique Systeme permettant de maitriser la forme d'un faisceau de particules chargees.
US5331180A (en) * 1992-04-30 1994-07-19 Fujitsu Limited Porous semiconductor light emitting device
DE69316960T2 (de) * 1992-11-12 1998-07-30 Koninkl Philips Electronics Nv Elektronenröhre mit Halbleiterkathode
DE69329253T2 (de) * 1992-12-08 2000-12-14 Koninklijke Philips Electronics N.V., Eindhoven Kathodenstrahlröhre mit Halbleiterkathode.
EP0645794B1 (en) * 1993-09-20 1997-11-26 Hewlett-Packard Company Focusing and steering electrodes for electron sources
TW286435B (US07541385-20090602-C00001.png) * 1994-07-27 1996-09-21 Siemens Ag
GB9905132D0 (en) * 1999-03-06 1999-04-28 Smiths Industries Plc Electron emitting devices
US6847045B2 (en) * 2001-10-12 2005-01-25 Hewlett-Packard Development Company, L.P. High-current avalanche-tunneling and injection-tunneling semiconductor-dielectric-metal stable cold emitter, which emulates the negative electron affinity mechanism of emission
JP4274129B2 (ja) 2005-01-31 2009-06-03 セイコーエプソン株式会社 プロジェクタ

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2912592A (en) * 1954-10-07 1959-11-10 Horizons Inc Memory device
NL107624C (US07541385-20090602-C00001.png) * 1955-09-01
US3060327A (en) * 1959-07-02 1962-10-23 Bell Telephone Labor Inc Transistor having emitter reversebiased beyond breakdown and collector forward-biased for majority carrier operation
US3363240A (en) * 1964-06-22 1968-01-09 Burroughs Corp Solid state electron emissive memory and display apparatus and method
GB1198567A (en) * 1968-05-17 1970-07-15 Gen Electric & English Elect Improvements in or relating to Electric Discharge Devices.
US3581151A (en) * 1968-09-16 1971-05-25 Bell Telephone Labor Inc Cold cathode structure comprising semiconductor whisker elements
GB1303660A (US07541385-20090602-C00001.png) * 1969-11-12 1973-01-17
GB1303659A (US07541385-20090602-C00001.png) * 1969-11-12 1973-01-17
GB1303658A (US07541385-20090602-C00001.png) * 1969-11-12 1973-01-17
US3755704A (en) * 1970-02-06 1973-08-28 Stanford Research Inst Field emission cathode structures and devices utilizing such structures
CA942824A (en) * 1970-06-08 1974-02-26 Robert J. Archer Cold cathode
US3808477A (en) * 1971-12-17 1974-04-30 Gen Electric Cold cathode structure
US3882355A (en) * 1972-12-29 1975-05-06 Ibm Flat screen display device using controlled cold cathodes
GB1457105A (en) * 1973-06-01 1976-12-01 English Electric Valve Co Ltd Electron guns
US4000503A (en) * 1976-01-02 1976-12-28 International Audio Visual, Inc. Cold cathode for infrared image tube
NL7604569A (nl) * 1976-04-29 1977-11-01 Philips Nv Veldemitterinrichting en werkwijze tot het vormen daarvan.
NL184549C (nl) * 1978-01-27 1989-08-16 Philips Nv Halfgeleiderinrichting voor het opwekken van een elektronenstroom en weergeefinrichting voorzien van een dergelijke halfgeleiderinrichting.

Also Published As

Publication number Publication date
AT375782B (de) 1984-09-10
AU4359179A (en) 1979-08-02
GB2068169B (en) 1982-12-08
CH640979A5 (de) 1984-01-31
GB2013398B (en) 1982-09-08
SE7900625L (sv) 1979-07-28
ES477148A1 (es) 1979-11-16
GB2068169A (en) 1981-08-05
FR2415879B1 (US07541385-20090602-C00001.png) 1983-07-22
JPS60241626A (ja) 1985-11-30
IT7919567A0 (it) 1979-01-24
AU521540B2 (en) 1982-04-08
BE873713A (fr) 1979-07-25
FR2415879A1 (fr) 1979-08-24
NL184549C (nl) 1989-08-16
JPS54111272A (en) 1979-08-31
JPS60241627A (ja) 1985-11-30
JPS6146931B2 (US07541385-20090602-C00001.png) 1986-10-16
CA1131795A (en) 1982-09-14
NL184549B (nl) 1989-03-16
SE438572B (sv) 1985-04-22
DE2902746A1 (de) 1979-08-02
IT1110930B (it) 1986-01-13
US4554564A (en) 1985-11-19
GB2013398A (en) 1979-08-08
US4259678A (en) 1981-03-31
ATA50979A (de) 1984-01-15
DE2902746C2 (de) 1987-01-15
US4325084A (en) 1982-04-13
JPS5828837A (ja) 1983-02-19
NL7800987A (nl) 1979-07-31

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